Micromachined CMOS thermoelectric generators as on-chip power supply

Keyphrases

• Micromachining 100%
• On-chip Power 100%
• Thermoelectric Generator 100%
• Power Consumption 50%
• Fabrication Methods 50%
• Standard CMOS Technology 50%
• Design Optimization 50%
• Electrical Energy 50%
• Electrical Resistance 50%
• Surface Micromachining 50%
• Microelectronics 50%
• Polysilicon 50%
• Chip-level 50%
• Waste Heat 50%
• Thermoelectric Materials 50%
• System Size 50%
• Electrical Power Output 50%
• Integrated chip 50%
• Power Supply Unit 50%
• Poly-Si 50%
• Temperature Drop 50%
• Microwatt 50%
• CMOS Fabrication 50%

Engineering

• Power Supply 100%
• Thermoelectrics 100%
• Electrical Power 100%
• Electric Power Utilization 50%
• Microscale 50%
• Surface Micro-Machining 50%
• Power Output 50%
• Size System 50%
• Optimised Design 50%
• Temperature Drop 50%
• Microelectronics 50%
• Polysilicon 50%
• Microwatts 50%
• Thermoelectric Materials 50%

Material Science

• Thermoelectrics 100%
• Thermoelectric Materials 50%
• Micromachining 50%
• Electrical Resistance 50%