Microfabricated free-standing epitaxial Y-Ba-Cu-O microbolometers on silicon substrates

R. Barth; J. Siewert; B. Spangenberg; Ch Jaekel; H. Kurz; H. Kinder; B. Utz W. Prusseit; H. Wolf

doi:10.1109/77.403080

Microfabricated free-standing epitaxial Y-Ba-Cu-O microbolometers on silicon substrates

R. Barth
, J. Siewert
, B. Spangenberg
, Ch Jaekel
, H. Kurz
, H. Kinder
, B. Utz W. Prusseit
, H. Wolf

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

The fabrication sequence of Y-Ba-Cu-O air-bridge microbolometers on silicon substrates is described. A comparison of air-bridge microbolometers and bolometers on bulk silicon is given. The bolometric response of the bolometers is studied with chopped IR illumination at a wavelength of 1.3 pm. The influence of the fabrication technique on the bolometer performance is discussed. Measurements of the voltage noise in free-standing Y-Ba-Cu-O microbolometers are presented and compared with the predicted values.

Original language	English
Pages (from-to)	2423-2426
Number of pages	4
Journal	IEEE Transactions on Applied Superconductivity
Volume	5
Issue number	2
DOIs	https://doi.org/10.1109/77.403080
State	Published - Jun 1995
Externally published	Yes

Access to Document

10.1109/77.403080

Cite this

@article{0b1dcfafedd14546a4fe2db682b9681e,

title = "Microfabricated free-standing epitaxial Y-Ba-Cu-O microbolometers on silicon substrates",

abstract = "The fabrication sequence of Y-Ba-Cu-O air-bridge microbolometers on silicon substrates is described. A comparison of air-bridge microbolometers and bolometers on bulk silicon is given. The bolometric response of the bolometers is studied with chopped IR illumination at a wavelength of 1.3 pm. The influence of the fabrication technique on the bolometer performance is discussed. Measurements of the voltage noise in free-standing Y-Ba-Cu-O microbolometers are presented and compared with the predicted values.",

author = "R. Barth and J. Siewert and B. Spangenberg and Ch Jaekel and H. Kurz and H. Kinder and Prusseit, \{B. Utz W.\} and H. Wolf",

year = "1995",

month = jun,

doi = "10.1109/77.403080",

language = "English",

volume = "5",

pages = "2423--2426",

journal = "IEEE Transactions on Applied Superconductivity",

issn = "1051-8223",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "2",

}

TY - JOUR

T1 - Microfabricated free-standing epitaxial Y-Ba-Cu-O microbolometers on silicon substrates

AU - Barth, R.

AU - Siewert, J.

AU - Spangenberg, B.

AU - Jaekel, Ch

AU - Kurz, H.

AU - Kinder, H.

AU - Prusseit, B. Utz W.

AU - Wolf, H.

PY - 1995/6

Y1 - 1995/6

N2 - The fabrication sequence of Y-Ba-Cu-O air-bridge microbolometers on silicon substrates is described. A comparison of air-bridge microbolometers and bolometers on bulk silicon is given. The bolometric response of the bolometers is studied with chopped IR illumination at a wavelength of 1.3 pm. The influence of the fabrication technique on the bolometer performance is discussed. Measurements of the voltage noise in free-standing Y-Ba-Cu-O microbolometers are presented and compared with the predicted values.

AB - The fabrication sequence of Y-Ba-Cu-O air-bridge microbolometers on silicon substrates is described. A comparison of air-bridge microbolometers and bolometers on bulk silicon is given. The bolometric response of the bolometers is studied with chopped IR illumination at a wavelength of 1.3 pm. The influence of the fabrication technique on the bolometer performance is discussed. Measurements of the voltage noise in free-standing Y-Ba-Cu-O microbolometers are presented and compared with the predicted values.

UR - https://www.scopus.com/pages/publications/0029327843

U2 - 10.1109/77.403080

DO - 10.1109/77.403080

M3 - Article

AN - SCOPUS:0029327843

SN - 1051-8223

VL - 5

SP - 2423

EP - 2426

JO - IEEE Transactions on Applied Superconductivity

JF - IEEE Transactions on Applied Superconductivity

IS - 2

ER -

Microfabricated free-standing epitaxial Y-Ba-Cu-O microbolometers on silicon substrates

Abstract

Access to Document

Other files and links

Fingerprint

Cite this