Microelectronic interconnects based on carbon nanotubes

Franz Kreupl, Andrew P. Graham, Maik Liebau, Georg S. Duesberg, Robert Seidel, Eugen Unger

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

Carbon nanotubes have emerged as a possible new material for electronic applications. They show promising characteristics for transistors as well as for interconnects. Here we review their basic properties and focus on the status of nanotubes with respect to their application as interconnects and discuss the challenges facing their integration.

Original languageEnglish
Pages (from-to)285-291
Number of pages7
JournalAdvanced Metallization Conference (AMC)
StatePublished - 2004
Externally publishedYes
EventAdvanced Metallization Conference 2004, AMC 2004 - San Diego, CA, United States
Duration: 19 Oct 200421 Oct 2004

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