Micro-fabrication of patterned LSCF thin-film cathodes with gold current collectors

Keyphrases

• Well-defined 100%
• Current Collector 100%
• Wet Etching 100%
• Thin-film Cathode 100%
• Microfabrication 100%
• Dry Etching 100%
• Single Crystal 50%
• Strontium 50%
• Electronic Conductivity 50%
• Lift-off 50%
• Activation Energy 50%
• Sidewall 50%
• Etching Process 50%
• Photolithography 50%
• Active Area 50%
• Yttria-stabilized Zirconia 50%
• Oxygen Reduction Reaction 50%
• Low Porosity 50%
• Pulsed Laser Deposition 50%
• Collector Geometry 50%
• Lanthanum 50%
• Etching Rate 50%
• Acid Etching 50%
• Heat Cycling 50%
• Vertical Sidewall 50%
• Columnar Microstructure 50%
• Zirconia Substrate 50%
• Micro-cathodes 50%
• Cobalt Iron Oxide 50%
• Sputter Etching 50%
• Ohmic Drop 50%
• Ar+ Sputtering 50%
• Preferential Choice 50%
• Shadow Mask 50%
• Dilute Hydrochloric Acid 50%
• Active TPB 50%

Material Science

• Cathode 100%
• Microfabrication 100%
• Thin Films 100%
• Wet Etching 66%
• Dry Etching 66%
• Film 33%
• Pulsed Laser Deposition 33%
• Cobalt 33%
• Activation Energy 33%
• Iron Oxide 33%
• Strontium 33%
• Lanthanum 33%
• Yttria Stabilized Zirconia 33%
• Single Crystal 33%