MEMS metallization

Christian Lohmann, Knut Gottfried, Andreas Bertz, Danny Reuter, Karla Hiller, Michael Kuhn, Thomas Gessner

Research output: Contribution to journalConference articlepeer-review


Silicon is the dominating material for the fabrication of MEMS devices, especially in high volume production, However, metals with their typical properties are used to enhance or enable the functionality of MEMS. In contrast to microelectronic technologies, not only the electrical but also the mechanical and optical behavior of metals could be helpful. New requirements in MEMS technologies demand optimized processes in metallization for the fabrication of micro-structures. This paper presents some metallization applications and related technology development in the field of MEMS.

Original languageEnglish
Pages (from-to)233-242
Number of pages10
JournalMaterials Research Society Symposium - Proceedings
StatePublished - 2004
Externally publishedYes
EventMaterials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics - 2004 - San Francisco, CA, United States
Duration: 13 Apr 200415 Apr 2004


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