Mehrfachbindungen zwischen Hauptgruppenelementen und Übergangsmetallen: CLXVI.1 Molekulare Organorhenium-Vorstufen für CVD-prozesse

Wolfgang A. Herrmann; Wolfgang M. Wachter; Fritz E. Kühn; Richard W. Fischer

doi:10.1016/S0022-328X(97)00607-4

Mehrfachbindungen zwischen Hauptgruppenelementen und Übergangsmetallen: CLXVI.¹ Molekulare Organorhenium-Vorstufen für CVD-prozesse

Wolfgang A. Herrmann, Wolfgang M. Wachter, Fritz E. Kühn, Richard W. Fischer

Technical University of Munich

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

Under TG/MS conditions only the organorhenium (VII) trioxides CH₃ReO₃ and C₂H₅ReO₃ sublime completely and without preliminary redox reactions. Choosing the right temperature conditions and organorhenium precursors in thermal CVD leads to layers containing only Re or ReO_x (x=1-3) or ReC_y (y<8.5).

Original language	English
Pages (from-to)	443-452
Number of pages	10
Journal	Journal of Organometallic Chemistry
Volume	553
Issue number	1-2
DOIs	https://doi.org/10.1016/S0022-328X(97)00607-4
State	Published - 25 Feb 1998

Keywords

Alkyl
Aryl
CVD
Rhenium
Thermogravimetry

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@article{ce41333460bb4e668cdc76dc7bdfb212,

title = "Mehrfachbindungen zwischen Hauptgruppenelementen und {\"U}bergangsmetallen: CLXVI.1 Molekulare Organorhenium-Vorstufen f{\"u}r CVD-prozesse",

abstract = "Under TG/MS conditions only the organorhenium (VII) trioxides CH3ReO3 and C2H5ReO3 sublime completely and without preliminary redox reactions. Choosing the right temperature conditions and organorhenium precursors in thermal CVD leads to layers containing only Re or ReOx (x=1-3) or ReCy (y<8.5).",

keywords = "Alkyl, Aryl, CVD, Rhenium, Thermogravimetry",

author = "Herrmann, {Wolfgang A.} and Wachter, {Wolfgang M.} and K{\"u}hn, {Fritz E.} and Fischer, {Richard W.}",

year = "1998",

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doi = "10.1016/S0022-328X(97)00607-4",

language = "English",

volume = "553",

pages = "443--452",

journal = "Journal of Organometallic Chemistry",

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T1 - Mehrfachbindungen zwischen Hauptgruppenelementen und Übergangsmetallen

T2 - CLXVI.1 Molekulare Organorhenium-Vorstufen für CVD-prozesse

AU - Herrmann, Wolfgang A.

AU - Wachter, Wolfgang M.

AU - Kühn, Fritz E.

AU - Fischer, Richard W.

PY - 1998/2/25

Y1 - 1998/2/25

N2 - Under TG/MS conditions only the organorhenium (VII) trioxides CH3ReO3 and C2H5ReO3 sublime completely and without preliminary redox reactions. Choosing the right temperature conditions and organorhenium precursors in thermal CVD leads to layers containing only Re or ReOx (x=1-3) or ReCy (y<8.5).

AB - Under TG/MS conditions only the organorhenium (VII) trioxides CH3ReO3 and C2H5ReO3 sublime completely and without preliminary redox reactions. Choosing the right temperature conditions and organorhenium precursors in thermal CVD leads to layers containing only Re or ReOx (x=1-3) or ReCy (y<8.5).

KW - Alkyl

KW - Aryl

KW - CVD

KW - Rhenium

KW - Thermogravimetry

UR - http://www.scopus.com/inward/record.url?scp=0000582858&partnerID=8YFLogxK

U2 - 10.1016/S0022-328X(97)00607-4

DO - 10.1016/S0022-328X(97)00607-4

M3 - Article

AN - SCOPUS:0000582858

SN - 0022-328X

VL - 553

SP - 443

EP - 452

JO - Journal of Organometallic Chemistry

JF - Journal of Organometallic Chemistry

IS - 1-2

ER -

Mehrfachbindungen zwischen Hauptgruppenelementen und Übergangsmetallen: CLXVI.¹ Molekulare Organorhenium-Vorstufen für CVD-prozesse

Abstract

Keywords

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