Measurement of QCM Mass Sensitivity Based on Electrodeposition

Xianhe Huang; Jianguo Hu; Alois Knoll

doi:10.1109/ASEMD49065.2020.9276091

Measurement of QCM Mass Sensitivity Based on Electrodeposition

Xianhe Huang
, Jianguo Hu
, Alois Knoll

Informatics 6 - Chair of Robotics, Artificial Intelligence and Real-time Systems

University of Electronic Science and Technology of China
Technical University of Munich

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this paper, we used a practical method to calculate the mass sensitivity of quartz crystal microbalance (QCM) based on electrodeposition. The QCMs were used widely due to their high mass sensitivity. Therefore, the measurement of QCM mass sensitivity is a vital research direction. The atomic force microscopy (AFM) and X-ray diffraction (XRD) measurements for deposited copper films on the electrode surface were carried out. We calculated three samples of AT-cut 10MHz quartz crystal resonators, and their mass sensitivities were 2.92 × 10-9 g/cm2·Hz, 3.21 × 10-9 g/cm2·Hz and 3.52 × 10-9 g/cm2·Hz. This practical method is helpful to calculate the mass sensitivity of QCM, and it can be extended to calculate other structure QCMs.

Original language	English
Title of host publication	2020 IEEE International Conference on Applied Superconductivity and Electromagnetic Devices, ASEMD 2020
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781728152158
DOIs	https://doi.org/10.1109/ASEMD49065.2020.9276091
State	Published - 16 Oct 2020
Event	2020 IEEE International Conference on Applied Superconductivity and Electromagnetic Devices, ASEMD 2020 - Virtual, Tianjin, China Duration: 16 Oct 2020 → 18 Oct 2020

Publication series

Name	2020 IEEE International Conference on Applied Superconductivity and Electromagnetic Devices, ASEMD 2020

Conference

Conference	2020 IEEE International Conference on Applied Superconductivity and Electromagnetic Devices, ASEMD 2020
Country/Territory	China
City	Virtual, Tianjin
Period	16/10/20 → 18/10/20

Keywords

QCM
electrodeposition
mass sesitivity

Access to Document

10.1109/ASEMD49065.2020.9276091

Cite this

Huang, X., Hu, J., & Knoll, A. (2020). Measurement of QCM Mass Sensitivity Based on Electrodeposition. In 2020 IEEE International Conference on Applied Superconductivity and Electromagnetic Devices, ASEMD 2020 Article 9276091 (2020 IEEE International Conference on Applied Superconductivity and Electromagnetic Devices, ASEMD 2020). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ASEMD49065.2020.9276091

Huang, Xianhe ; Hu, Jianguo ; Knoll, Alois. / Measurement of QCM Mass Sensitivity Based on Electrodeposition. 2020 IEEE International Conference on Applied Superconductivity and Electromagnetic Devices, ASEMD 2020. Institute of Electrical and Electronics Engineers Inc., 2020. (2020 IEEE International Conference on Applied Superconductivity and Electromagnetic Devices, ASEMD 2020).

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title = "Measurement of QCM Mass Sensitivity Based on Electrodeposition",

abstract = "In this paper, we used a practical method to calculate the mass sensitivity of quartz crystal microbalance (QCM) based on electrodeposition. The QCMs were used widely due to their high mass sensitivity. Therefore, the measurement of QCM mass sensitivity is a vital research direction. The atomic force microscopy (AFM) and X-ray diffraction (XRD) measurements for deposited copper films on the electrode surface were carried out. We calculated three samples of AT-cut 10MHz quartz crystal resonators, and their mass sensitivities were 2.92 × 10-9 g/cm2·Hz, 3.21 × 10-9 g/cm2·Hz and 3.52 × 10-9 g/cm2·Hz. This practical method is helpful to calculate the mass sensitivity of QCM, and it can be extended to calculate other structure QCMs.",

keywords = "QCM, electrodeposition, mass sesitivity",

author = "Xianhe Huang and Jianguo Hu and Alois Knoll",

note = "Publisher Copyright: {\textcopyright} 2020 IEEE.; 2020 IEEE International Conference on Applied Superconductivity and Electromagnetic Devices, ASEMD 2020 ; Conference date: 16-10-2020 Through 18-10-2020",

year = "2020",

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doi = "10.1109/ASEMD49065.2020.9276091",

language = "English",

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Huang, X, Hu, J & Knoll, A 2020, Measurement of QCM Mass Sensitivity Based on Electrodeposition. in 2020 IEEE International Conference on Applied Superconductivity and Electromagnetic Devices, ASEMD 2020., 9276091, 2020 IEEE International Conference on Applied Superconductivity and Electromagnetic Devices, ASEMD 2020, Institute of Electrical and Electronics Engineers Inc., 2020 IEEE International Conference on Applied Superconductivity and Electromagnetic Devices, ASEMD 2020, Virtual, Tianjin, China, 16/10/20. https://doi.org/10.1109/ASEMD49065.2020.9276091

Measurement of QCM Mass Sensitivity Based on Electrodeposition. / Huang, Xianhe; Hu, Jianguo; Knoll, Alois.
2020 IEEE International Conference on Applied Superconductivity and Electromagnetic Devices, ASEMD 2020. Institute of Electrical and Electronics Engineers Inc., 2020. 9276091 (2020 IEEE International Conference on Applied Superconductivity and Electromagnetic Devices, ASEMD 2020).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Measurement of QCM Mass Sensitivity Based on Electrodeposition

AU - Huang, Xianhe

AU - Hu, Jianguo

AU - Knoll, Alois

PY - 2020/10/16

Y1 - 2020/10/16

N2 - In this paper, we used a practical method to calculate the mass sensitivity of quartz crystal microbalance (QCM) based on electrodeposition. The QCMs were used widely due to their high mass sensitivity. Therefore, the measurement of QCM mass sensitivity is a vital research direction. The atomic force microscopy (AFM) and X-ray diffraction (XRD) measurements for deposited copper films on the electrode surface were carried out. We calculated three samples of AT-cut 10MHz quartz crystal resonators, and their mass sensitivities were 2.92 × 10-9 g/cm2·Hz, 3.21 × 10-9 g/cm2·Hz and 3.52 × 10-9 g/cm2·Hz. This practical method is helpful to calculate the mass sensitivity of QCM, and it can be extended to calculate other structure QCMs.

AB - In this paper, we used a practical method to calculate the mass sensitivity of quartz crystal microbalance (QCM) based on electrodeposition. The QCMs were used widely due to their high mass sensitivity. Therefore, the measurement of QCM mass sensitivity is a vital research direction. The atomic force microscopy (AFM) and X-ray diffraction (XRD) measurements for deposited copper films on the electrode surface were carried out. We calculated three samples of AT-cut 10MHz quartz crystal resonators, and their mass sensitivities were 2.92 × 10-9 g/cm2·Hz, 3.21 × 10-9 g/cm2·Hz and 3.52 × 10-9 g/cm2·Hz. This practical method is helpful to calculate the mass sensitivity of QCM, and it can be extended to calculate other structure QCMs.

KW - QCM

KW - electrodeposition

KW - mass sesitivity

UR - https://www.scopus.com/pages/publications/85099281987

U2 - 10.1109/ASEMD49065.2020.9276091

DO - 10.1109/ASEMD49065.2020.9276091

M3 - Conference contribution

AN - SCOPUS:85099281987

T3 - 2020 IEEE International Conference on Applied Superconductivity and Electromagnetic Devices, ASEMD 2020

BT - 2020 IEEE International Conference on Applied Superconductivity and Electromagnetic Devices, ASEMD 2020

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2020 IEEE International Conference on Applied Superconductivity and Electromagnetic Devices, ASEMD 2020

Y2 - 16 October 2020 through 18 October 2020

ER -

Huang X, Hu J, Knoll A. Measurement of QCM Mass Sensitivity Based on Electrodeposition. In 2020 IEEE International Conference on Applied Superconductivity and Electromagnetic Devices, ASEMD 2020. Institute of Electrical and Electronics Engineers Inc. 2020. 9276091. (2020 IEEE International Conference on Applied Superconductivity and Electromagnetic Devices, ASEMD 2020). doi: 10.1109/ASEMD49065.2020.9276091

Measurement of QCM Mass Sensitivity Based on Electrodeposition

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