Measurement of QCM Mass Sensitivity Based on Electrodeposition

Xianhe Huang, Jianguo Hu, Alois Knoll

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this paper, we used a practical method to calculate the mass sensitivity of quartz crystal microbalance (QCM) based on electrodeposition. The QCMs were used widely due to their high mass sensitivity. Therefore, the measurement of QCM mass sensitivity is a vital research direction. The atomic force microscopy (AFM) and X-ray diffraction (XRD) measurements for deposited copper films on the electrode surface were carried out. We calculated three samples of AT-cut 10MHz quartz crystal resonators, and their mass sensitivities were 2.92 × 10-9 g/cm2·Hz, 3.21 × 10-9 g/cm2·Hz and 3.52 × 10-9 g/cm2·Hz. This practical method is helpful to calculate the mass sensitivity of QCM, and it can be extended to calculate other structure QCMs.

Original languageEnglish
Title of host publication2020 IEEE International Conference on Applied Superconductivity and Electromagnetic Devices, ASEMD 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728152158
DOIs
StatePublished - 16 Oct 2020
Event2020 IEEE International Conference on Applied Superconductivity and Electromagnetic Devices, ASEMD 2020 - Virtual, Tianjin, China
Duration: 16 Oct 202018 Oct 2020

Publication series

Name2020 IEEE International Conference on Applied Superconductivity and Electromagnetic Devices, ASEMD 2020

Conference

Conference2020 IEEE International Conference on Applied Superconductivity and Electromagnetic Devices, ASEMD 2020
Country/TerritoryChina
CityVirtual, Tianjin
Period16/10/2018/10/20

Keywords

  • QCM
  • electrodeposition
  • mass sesitivity

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