Materials and materials issues relating to high-performance gas sensing technologies

Gerhard Müller, Olaf Schulz, Jan Spannhake, Andreas Helwig, Simon Ahlers, Johann Göbel

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

High-performance gas sensing technologies like photo-acoustic gas detection and ion mobility spectrometry rely on microcomponents, which require extended operation at high temperatures. In this context silicon-on-insulator wafers as well as wide-bandgap materials such as silicon carbide and metal oxide semiconductors are of interest. We show that such materials can be combined to perform a variety of mechanical, thermal, electrical and gas-sensing functionalities. Materials and technology development issues relating to such materials are outlined.

Original languageEnglish
Title of host publicationCollection of Technical Papers - CANEUS 2004 - Conference on Micro-Nano-Technologies for Aerospace Applications
PublisherAmerican Institute of Aeronautics and Astronautics Inc.
Pages230-238
Number of pages9
ISBN (Print)1563477211, 9781563477218
DOIs
StatePublished - 2004
Externally publishedYes
EventCollection of Technical Papers - CANEUS 2004 - Conference on Micro-Nano-Technologies for Aerospace Applications - Monterey, CA, United States
Duration: 1 Nov 20045 Nov 2004

Publication series

NameCollection of Technical Papers - CANEUS 2004 - Conference on Micro-Nano-Technologies for Aerospace Applications

Conference

ConferenceCollection of Technical Papers - CANEUS 2004 - Conference on Micro-Nano-Technologies for Aerospace Applications
Country/TerritoryUnited States
CityMonterey, CA
Period1/11/045/11/04

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