@inproceedings{ae32e45c394942cba53d8366696754cc,
title = "Macromodeling of fluidic damping effects in microdevices",
abstract = "The operation of many mechatronical microdevices is significantly affected by viscous fluid damping effects. We present a methodology how these effects can be properly included in physically based microdevice and full system models for the effort-economizing and yet accurate predictive simulation of the operation of micro-mechatronical systems. The usability and quality of the approach is demonstrated by computational results for highly perforated microdevices.",
author = "G. Wachutka and G. Schrag and R. Sattler",
note = "Publisher Copyright: {\textcopyright} 2002 IEEE.; 4th International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM 2002 ; Conference date: 14-10-2002 Through 16-10-2002",
year = "2002",
doi = "10.1109/ASDAM.2002.1088536",
language = "English",
series = "ASDAM 2002 - Conference Proceedings, 4th International Conference on Advanced Semiconductor Devices and Microsystems",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "329--332",
editor = "Daniel Donoval and Juraj Breza",
booktitle = "ASDAM 2002 - Conference Proceedings, 4th International Conference on Advanced Semiconductor Devices and Microsystems",
}