Macromodeling of fluidic damping effects in microdevices

G. Wachutka, G. Schrag, R. Sattler

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The operation of many mechatronical microdevices is significantly affected by viscous fluid damping effects. We present a methodology how these effects can be properly included in physically based microdevice and full system models for the effort-economizing and yet accurate predictive simulation of the operation of micro-mechatronical systems. The usability and quality of the approach is demonstrated by computational results for highly perforated microdevices.

Original languageEnglish
Title of host publicationASDAM 2002 - Conference Proceedings, 4th International Conference on Advanced Semiconductor Devices and Microsystems
EditorsDaniel Donoval, Juraj Breza
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages329-332
Number of pages4
ISBN (Electronic)078037276X, 9780780372764
DOIs
StatePublished - 2002
Event4th International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM 2002 - Smolenice, Slovakia
Duration: 14 Oct 200216 Oct 2002

Publication series

NameASDAM 2002 - Conference Proceedings, 4th International Conference on Advanced Semiconductor Devices and Microsystems

Conference

Conference4th International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM 2002
Country/TerritorySlovakia
CitySmolenice
Period14/10/0216/10/02

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