TY - JOUR
T1 - Low-temperature preparation of superconducting YBa2Cu 3O7-δ films on Si, MgO, and SrTiO3 by thermal coevaporation
AU - Berberich, P.
AU - Tate, J.
AU - Dietsche, W.
AU - Kinder, H.
PY - 1988
Y1 - 1988
N2 - We used simple thermal coevaporation of yttrium, barium, and copper in an oxygen atmosphere to produce thin films of the 90 K superconductor, YBa 2Cu3O7-δ, on silicon, magnesium oxide, and strontium titanate. The films were deposited on 650 °C substrates and were superconducting when removed from the evaporator. A short post-anneal at 480 °C produced films on bare Si with transition temperatures (R=0) of 85 K. Films as thin as 0.13 μm, superconducting at 91 K (on MgO) and 89 K (on SrTiO3), were obtained with no post-anneal.
AB - We used simple thermal coevaporation of yttrium, barium, and copper in an oxygen atmosphere to produce thin films of the 90 K superconductor, YBa 2Cu3O7-δ, on silicon, magnesium oxide, and strontium titanate. The films were deposited on 650 °C substrates and were superconducting when removed from the evaporator. A short post-anneal at 480 °C produced films on bare Si with transition temperatures (R=0) of 85 K. Films as thin as 0.13 μm, superconducting at 91 K (on MgO) and 89 K (on SrTiO3), were obtained with no post-anneal.
UR - http://www.scopus.com/inward/record.url?scp=0041003301&partnerID=8YFLogxK
U2 - 10.1063/1.100647
DO - 10.1063/1.100647
M3 - Article
AN - SCOPUS:0041003301
SN - 0003-6951
VL - 53
SP - 925
EP - 926
JO - Applied Physics Letters
JF - Applied Physics Letters
IS - 10
ER -