Local temperature distribution in Si-MOSFETs studied by micro-raman spectroscopy

R. Ostermeir, K. Brunner, G. Abstreiter, W. Weber

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

The local rise of lattice temperatures in enhancement MOSFET's is analyzed by the frequency shift of the silicon optical phonon using Raman spectroscopy with submicron spatial resolution. Operating the devices beyond saturation a source drain asymmetry is observed corresponding to the heat dissipation profile peaked at the pinch off region. A reduction of channel length at standard conditions leads to a local temperature increase due to the enhanced electrical power. An anisotropic behaviour of the temperature distribution is also found in the substrate surrounding the MOSFET, which is related to the geometric shape of the heat source. The experimental results are in good agreement with a simnple model calculation based on device parameters.

Original languageEnglish
Title of host publicationESSDERC 1990 - 20th European Solid State Device Research Conference
EditorsW. Eccleston, P. J. Rosser
PublisherIEEE Computer Society
Pages591-594
Number of pages4
ISBN (Electronic)0750300655
StatePublished - 1990
Event20th European Solid State Device Research Conference, ESSDERC 1990 - Nottingham, United Kingdom
Duration: 10 Sep 199013 Sep 1990

Publication series

NameEuropean Solid-State Device Research Conference
ISSN (Print)1930-8876

Conference

Conference20th European Solid State Device Research Conference, ESSDERC 1990
Country/TerritoryUnited Kingdom
CityNottingham
Period10/09/9013/09/90

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