Liquid nitrogen cooled sample stage for scanning electron microscopy using a superconducting YBa2Cu3O7-δ shield

R. Gerber; T. Nissel; H. G. Wener; A. Willmann; R. P. Huebener; D. Koelle; R. Gross

doi:10.1016/S0011-2275(96)00104-X

Liquid nitrogen cooled sample stage for scanning electron microscopy using a superconducting YBa₂Cu₃O_7-δ shield

R. Gerber, T. Nissel, H. G. Wener, A. Willmann, R. P. Huebener, D. Koelle, R. Gross

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

We have built a liquid nitrogen cooled low temperature stage for scanning electron microscopes, which is specially designed for the study of high transition temperature (T_c) superconducting devices and circuits in very small and stable magnetic fields. For effective magnetic shielding of the sample we use a superconducting cylindric YBa₂Cu₃O_7-δ shield in addition to several Mumetall shields. Samples can be operated in a temperature range between 77 and 130 K while they are directly irradiated by the electron beam. This setup allows the study of local superconducting properties of high T_c thin film devices or multilayer circuits on a micrometer scale.

Original language	English
Pages (from-to)	21-25
Number of pages	5
Journal	Cryogenics
Volume	37
Issue number	1
DOIs	https://doi.org/10.1016/S0011-2275(96)00104-X
State	Published - Jan 1997
Externally published	Yes

Keywords

Cryostats
High t superconductivity
Scanning electron microscopy

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10.1016/S0011-2275(96)00104-X

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abstract = "We have built a liquid nitrogen cooled low temperature stage for scanning electron microscopes, which is specially designed for the study of high transition temperature (Tc) superconducting devices and circuits in very small and stable magnetic fields. For effective magnetic shielding of the sample we use a superconducting cylindric YBa2Cu3O7-δ shield in addition to several Mumetall shields. Samples can be operated in a temperature range between 77 and 130 K while they are directly irradiated by the electron beam. This setup allows the study of local superconducting properties of high Tc thin film devices or multilayer circuits on a micrometer scale.",

keywords = "Cryostats, High t superconductivity, Scanning electron microscopy",

author = "R. Gerber and T. Nissel and Wener, {H. G.} and A. Willmann and Huebener, {R. P.} and D. Koelle and R. Gross",

year = "1997",

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T1 - Liquid nitrogen cooled sample stage for scanning electron microscopy using a superconducting YBa2Cu3O7-δ shield

AU - Gerber, R.

AU - Nissel, T.

AU - Wener, H. G.

AU - Willmann, A.

AU - Huebener, R. P.

AU - Koelle, D.

AU - Gross, R.

PY - 1997/1

Y1 - 1997/1

N2 - We have built a liquid nitrogen cooled low temperature stage for scanning electron microscopes, which is specially designed for the study of high transition temperature (Tc) superconducting devices and circuits in very small and stable magnetic fields. For effective magnetic shielding of the sample we use a superconducting cylindric YBa2Cu3O7-δ shield in addition to several Mumetall shields. Samples can be operated in a temperature range between 77 and 130 K while they are directly irradiated by the electron beam. This setup allows the study of local superconducting properties of high Tc thin film devices or multilayer circuits on a micrometer scale.

AB - We have built a liquid nitrogen cooled low temperature stage for scanning electron microscopes, which is specially designed for the study of high transition temperature (Tc) superconducting devices and circuits in very small and stable magnetic fields. For effective magnetic shielding of the sample we use a superconducting cylindric YBa2Cu3O7-δ shield in addition to several Mumetall shields. Samples can be operated in a temperature range between 77 and 130 K while they are directly irradiated by the electron beam. This setup allows the study of local superconducting properties of high Tc thin film devices or multilayer circuits on a micrometer scale.

KW - Cryostats

KW - High t superconductivity

KW - Scanning electron microscopy

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DO - 10.1016/S0011-2275(96)00104-X

M3 - Article

AN - SCOPUS:0038851804

SN - 0011-2275

VL - 37

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JO - Cryogenics

JF - Cryogenics

IS - 1

ER -

Liquid nitrogen cooled sample stage for scanning electron microscopy using a superconducting YBa₂Cu₃O_7-δ shield

Abstract

Keywords

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