Linewidth of surface micro-machined MEMS tunable VCSELs at 1:5μm

C. Gierl; T. Gruendl; K. Zogal; C. Grasse; H. A. Davani; G. Bölhm; F. Küppers; P. Meissner; M. C. Amann

Linewidth of surface micro-machined MEMS tunable VCSELs at 1:5μm

C. Gierl, T. Gruendl, K. Zogal, C. Grasse, H. A. Davani, G. Bölhm, F. Küppers, P. Meissner, M. C. Amann

Chair of Semiconductor Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

We demonstrate the linewidth characteristics of a micro-electro-mechanical system (MEMS) widely tunable VCSEL based on a newly developed surface micro-machining technology. The minimal linewidth is 98MHz at thermal rollover.

Original language	English
Title of host publication	CLEO
Subtitle of host publication	Science and Innovations, CLEO_SI 2012
Pages	CTu3N.2
State	Published - 2012
Event	CLEO: Science and Innovations, CLEO_SI 2012 - San Jose, CA, United States Duration: 6 May 2012 → 11 May 2012

Publication series

Name	CLEO: Science and Innovations, CLEO_SI 2012

Conference

Conference	CLEO: Science and Innovations, CLEO_SI 2012
Country/Territory	United States
City	San Jose, CA
Period	6/05/12 → 11/05/12

Cite this

@inproceedings{dfb11e76ac0b4683af5134b4acffdb99,

title = "Linewidth of surface micro-machined MEMS tunable VCSELs at 1:5μm",

abstract = "We demonstrate the linewidth characteristics of a micro-electro-mechanical system (MEMS) widely tunable VCSEL based on a newly developed surface micro-machining technology. The minimal linewidth is 98MHz at thermal rollover.",

author = "C. Gierl and T. Gruendl and K. Zogal and C. Grasse and Davani, {H. A.} and G. B{\"o}lhm and F. K{\"u}ppers and P. Meissner and Amann, {M. C.}",

year = "2012",

language = "English",

isbn = "9781557529435",

series = "CLEO: Science and Innovations, CLEO_SI 2012",

pages = "CTu3N.2",

booktitle = "CLEO",

note = "CLEO: Science and Innovations, CLEO_SI 2012 ; Conference date: 06-05-2012 Through 11-05-2012",

}

TY - GEN

T1 - Linewidth of surface micro-machined MEMS tunable VCSELs at 1:5μm

AU - Gierl, C.

AU - Gruendl, T.

AU - Zogal, K.

AU - Grasse, C.

AU - Davani, H. A.

AU - Bölhm, G.

AU - Küppers, F.

AU - Meissner, P.

AU - Amann, M. C.

PY - 2012

Y1 - 2012

N2 - We demonstrate the linewidth characteristics of a micro-electro-mechanical system (MEMS) widely tunable VCSEL based on a newly developed surface micro-machining technology. The minimal linewidth is 98MHz at thermal rollover.

AB - We demonstrate the linewidth characteristics of a micro-electro-mechanical system (MEMS) widely tunable VCSEL based on a newly developed surface micro-machining technology. The minimal linewidth is 98MHz at thermal rollover.

UR - http://www.scopus.com/inward/record.url?scp=84890573156&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84890573156

SN - 9781557529435

T3 - CLEO: Science and Innovations, CLEO_SI 2012

SP - CTu3N.2

BT - CLEO

T2 - CLEO: Science and Innovations, CLEO_SI 2012

Y2 - 6 May 2012 through 11 May 2012

ER -

Linewidth of surface micro-machined MEMS tunable VCSELs at 1:5μm

Abstract

Publication series

Conference

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