LI-MOCVD of HfO2 thin films using engineered amide based Hf precursors

Andrian Milanov, Reji Thomas, Malte Hellwig, Klaus Merz, Hans Werner Becker, Peter Ehrhart, Roland A. Fischer, Rainer Waser, Anjana Devi

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

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Keyphrases

Material Science

Engineering

Chemistry

Chemical Engineering