TY - GEN
T1 - Layer Stack Dependencies of Self-Generated Nonlinear Signals in Layered SAW Resonators
AU - Forster, Thomas
AU - Mayer, Markus
AU - Chauhan, Vikrant
AU - Schmidt, Peter
AU - Ebner, Thomas
AU - Wagner, Karl
AU - Hagelauer, Amelie
N1 - Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - In this work a systematic investigation was carried out, which targeted the dependencies of nonlinear generated signals on the layer stack of a device. Previous work on material contributions to nonlinearity focused almost exclusively on TC-SAW devices. To clarify how nonlinearity depends on the stack of layered systems, test devices with a nearly constant admittance curve for respectively different layer stacks were designed. Using the Design of Experiment methodology, a response surface depending on three layer thicknesses was derived.
AB - In this work a systematic investigation was carried out, which targeted the dependencies of nonlinear generated signals on the layer stack of a device. Previous work on material contributions to nonlinearity focused almost exclusively on TC-SAW devices. To clarify how nonlinearity depends on the stack of layered systems, test devices with a nearly constant admittance curve for respectively different layer stacks were designed. Using the Design of Experiment methodology, a response surface depending on three layer thicknesses was derived.
UR - http://www.scopus.com/inward/record.url?scp=85143804271&partnerID=8YFLogxK
U2 - 10.1109/IUS54386.2022.9957339
DO - 10.1109/IUS54386.2022.9957339
M3 - Conference contribution
AN - SCOPUS:85143804271
T3 - IEEE International Ultrasonics Symposium, IUS
BT - IUS 2022 - IEEE International Ultrasonics Symposium
PB - IEEE Computer Society
T2 - 2022 IEEE International Ultrasonics Symposium, IUS 2022
Y2 - 10 October 2022 through 13 October 2022
ER -