Lateral structuring of silicon thin films by interference crystallization

Keyphrases

• Crystallization 100%
• Multicrystalline Silicon 100%
• Silicon Thin Film 100%
• Amorphous Silicon Thin Film 50%
• Energy Density 50%
• Pulsed Laser 50%
• Amorphous Phase 50%
• Submicron 50%
• Simultaneous Growth 50%
• C-Si 50%
• Holography 50%
• High Pulse Energy 50%
• Selectively Etching 50%
• Silane Plasma 50%
• Optical Grid 50%

Material Science

• Silicon 100%
• Microcrystalline Silicon 100%
• Thin Films 100%
• Amorphous Silicon 50%
• Silane 50%
• Energy Density 50%
• Laser Pulse 50%

Engineering

• Microcrystalline Silicon 100%
• Thin film silicon 100%
• Amorphous Phase 50%
• Flux Density 50%