Laser source independent basic parameters - Focus position, pulse overlap, track overlap in laser micro milling using as rapid manufacturing process

Markus Kagerer, Franz Irlinger, Tim C. Lueth

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

9 Scopus citations

Abstract

Laser micro machining belongs to the most important processes in rapid prototyping / rapid manufacturing. Especially Nd:YAG lasers with a galvanometer scanner are extremely common in manufacturing Micro-Electro-Mechanical-Systems (MEMS) in a time and cost saving manner. Moreover, laser micro milling is one of the most significant processes in laser micro machining apart from laser micro cutting and micro welding. In recent years a lot of investigations were done for direct parameters of the laser source such as the laser power, the fluence, the repetition rate, the lamp current, and the pulse duration. These parameters are not applicable to other laser systems because they are depending on the used laser source. The basic parameters (focus position, pulse overlap, track overlap), which are completely independent of the used laser sources, were mostly neglected although they have a huge influence on the result of the process. Therefore, this project investigates laser micro milling square pockets in silicon with a nanosecond Nd:YAG IR laser. For each basic parameter the ablation rate, the surface roughness as well as the machining diameter are determined.

Original languageEnglish
Title of host publicationAIM 2012 - 2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Conference Digest
Pages135-140
Number of pages6
DOIs
StatePublished - 2012
Event2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2012 - Kaohsiung, Taiwan, Province of China
Duration: 11 Jul 201214 Jul 2012

Publication series

NameIEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM

Conference

Conference2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2012
Country/TerritoryTaiwan, Province of China
CityKaohsiung
Period11/07/1214/07/12

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