TY - GEN
T1 - Laser source independent basic parameters - Focus position, pulse overlap, track overlap in laser micro milling using as rapid manufacturing process
AU - Kagerer, Markus
AU - Irlinger, Franz
AU - Lueth, Tim C.
PY - 2012
Y1 - 2012
N2 - Laser micro machining belongs to the most important processes in rapid prototyping / rapid manufacturing. Especially Nd:YAG lasers with a galvanometer scanner are extremely common in manufacturing Micro-Electro-Mechanical-Systems (MEMS) in a time and cost saving manner. Moreover, laser micro milling is one of the most significant processes in laser micro machining apart from laser micro cutting and micro welding. In recent years a lot of investigations were done for direct parameters of the laser source such as the laser power, the fluence, the repetition rate, the lamp current, and the pulse duration. These parameters are not applicable to other laser systems because they are depending on the used laser source. The basic parameters (focus position, pulse overlap, track overlap), which are completely independent of the used laser sources, were mostly neglected although they have a huge influence on the result of the process. Therefore, this project investigates laser micro milling square pockets in silicon with a nanosecond Nd:YAG IR laser. For each basic parameter the ablation rate, the surface roughness as well as the machining diameter are determined.
AB - Laser micro machining belongs to the most important processes in rapid prototyping / rapid manufacturing. Especially Nd:YAG lasers with a galvanometer scanner are extremely common in manufacturing Micro-Electro-Mechanical-Systems (MEMS) in a time and cost saving manner. Moreover, laser micro milling is one of the most significant processes in laser micro machining apart from laser micro cutting and micro welding. In recent years a lot of investigations were done for direct parameters of the laser source such as the laser power, the fluence, the repetition rate, the lamp current, and the pulse duration. These parameters are not applicable to other laser systems because they are depending on the used laser source. The basic parameters (focus position, pulse overlap, track overlap), which are completely independent of the used laser sources, were mostly neglected although they have a huge influence on the result of the process. Therefore, this project investigates laser micro milling square pockets in silicon with a nanosecond Nd:YAG IR laser. For each basic parameter the ablation rate, the surface roughness as well as the machining diameter are determined.
UR - http://www.scopus.com/inward/record.url?scp=84866935436&partnerID=8YFLogxK
U2 - 10.1109/AIM.2012.6265899
DO - 10.1109/AIM.2012.6265899
M3 - Conference contribution
AN - SCOPUS:84866935436
SN - 9781467325752
T3 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM
SP - 135
EP - 140
BT - AIM 2012 - 2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Conference Digest
T2 - 2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2012
Y2 - 11 July 2012 through 14 July 2012
ER -