Abstract
A nondestructive high-resolution technique for the optical detection of the phase and amplitude of high-frequency surface acoustic wave (SAW) devices is presented. The test setup incorporates a mode-locked ps-laser harmonic mixing, and coherent detection. Dynamic range and minimum detectable surface displacement were 50 dB and 1 pm/√Hz, respectively. The probing technique allows not only the measurement of the SAW field but also the precise direct determination of the phase velocity which is a fundamental design parameter in SAW technology. We present experimental results of the phase velocity of both SAW and Leaky SAW modes on quartz, LiNbO3 and LiTaO3 with an accuracy of up to 1.5.10-5. Our results agree very good with theory and other experiments.
| Original language | English |
|---|---|
| Pages (from-to) | 1541-1544 |
| Number of pages | 4 |
| Journal | IEEE MTT-S International Microwave Symposium Digest |
| Volume | 3 |
| State | Published - 1996 |
| Event | Proceedings of the 1996 IEEE MTT-S International Microwave Symposium Digest. Part 1 (of 3) - San Franscisco, CA, USA Duration: 17 Jun 1996 → 21 Jun 1996 |
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