Laser-induced-fluorescence observation of ion velocity distribution functions in a plasma sheath

Experimental results obtained by laser-induced-fluorescence on metastable ion velocity distribution functions (MIVDF) in electrostatic presheaths and sheaths in argon plasmas produced by the thermoionic effect in a multipolar de discharge are presented. The shape of the measured MIVDF are in qualitative agreement, for the presheath, with Emmert's model and exhibit: (1) a Maxwellian profile at the center of the device where the potential is zero; (2) a distribution function's shape made of three distinct parts at the entrance of the presheath. Inside the sheath the recorded MIVDF recovers a Maxwellian profile with a width unexpectedly related to the background neutral pressure. The velocity and potential profiles that can be deduced from the measured MIVDF show a strong influence of the primary electrons emitted by the filaments.