Investigation of precipitation in Czochralski silicon by phonon spectroscopy

G. Schrag, M. Rebmann, C. Wurster, F. Zeller, K. Lassmann, W. Eisenmenger

Research output: Contribution to journalArticlepeer-review

3 Scopus citations


Various types of precipitates are known to form in oxygen-rich silicon depending on annealing history and codoping with carbon. We have used superconducting tunnelling junctions for phonon spectroscopy in the range of wavelengths corresponding to the size of such agglomerates. Frequency- and time-resolved measurements in transmission and backscattering geometry show increased elastic scattering in the whole energy range after annealing. Additionally, a broad-band inelastic scattering component is associated with carbon-lean material and narrow-band scattering around 41OGHz is observed for carbon-rich samples after annealing above 1200 °C These variations are compared with those observed around the 9μm oxygen line in low-temperature infrared spectroscopy.

Original languageEnglish
Pages (from-to)37-48
Number of pages12
JournalPhysica Status Solidi (A) Applied Research
Issue number1
StatePublished - 1998


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