Integration of Carbon Nanotubes Devices into Microelectronics

W. Hoenlein, F. Kreupl, G. S. Duesberg, A. P. Graham, M. Liebau, R. Seidel, E. Unger

Research output: Contribution to journalConference articlepeer-review

12 Scopus citations

Abstract

Carbon Nanotubes (CNTs) offer extraordinary properties for applications in microelectronics. We assess the methods used to grow CNTs for integration into microelectronics, in particular, metallic carbon nanotubes for vias and interconnects as well as semiconducting CNTs for field-effect devices are discussed. State-of-the-art CNTFETs are compared to Si-MOSFETs. A vertical CNTFET (VCNTFET) device concept is presented which offers better growth control, adding a new quality to microelectronics and making real 3-dimensional electronics possible.

Original languageEnglish
Pages (from-to)3-15
Number of pages13
JournalMaterials Research Society Symposium - Proceedings
Volume772
DOIs
StatePublished - 2003
Externally publishedYes
EventMaterials Research Society Symposium Proceedings: Nanotube-Based Devices - San Francisco, Ca., United States
Duration: 22 Apr 200325 Apr 2003

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