Integration of Carbon Nanotubes Devices into Microelectronics

W. Hoenlein; F. Kreupl; G. S. Duesberg; A. P. Graham; M. Liebau; R. Seidel; E. Unger

doi:10.1557/proc-772-m4.5

Integration of Carbon Nanotubes Devices into Microelectronics

W. Hoenlein, F. Kreupl, G. S. Duesberg, A. P. Graham, M. Liebau, R. Seidel, E. Unger

Infineon Technologies AG

Research output: Contribution to journal › Conference article › peer-review

12 Scopus citations

Abstract

Carbon Nanotubes (CNTs) offer extraordinary properties for applications in microelectronics. We assess the methods used to grow CNTs for integration into microelectronics, in particular, metallic carbon nanotubes for vias and interconnects as well as semiconducting CNTs for field-effect devices are discussed. State-of-the-art CNTFETs are compared to Si-MOSFETs. A vertical CNTFET (VCNTFET) device concept is presented which offers better growth control, adding a new quality to microelectronics and making real 3-dimensional electronics possible.

Original language	English
Pages (from-to)	3-15
Number of pages	13
Journal	Materials Research Society Symposium - Proceedings
Volume	772
DOIs	https://doi.org/10.1557/proc-772-m4.5
State	Published - 2003
Externally published	Yes
Event	Materials Research Society Symposium Proceedings: Nanotube-Based Devices - San Francisco, Ca., United States Duration: 22 Apr 2003 → 25 Apr 2003

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title = "Integration of Carbon Nanotubes Devices into Microelectronics",

abstract = "Carbon Nanotubes (CNTs) offer extraordinary properties for applications in microelectronics. We assess the methods used to grow CNTs for integration into microelectronics, in particular, metallic carbon nanotubes for vias and interconnects as well as semiconducting CNTs for field-effect devices are discussed. State-of-the-art CNTFETs are compared to Si-MOSFETs. A vertical CNTFET (VCNTFET) device concept is presented which offers better growth control, adding a new quality to microelectronics and making real 3-dimensional electronics possible.",

author = "W. Hoenlein and F. Kreupl and Duesberg, {G. S.} and Graham, {A. P.} and M. Liebau and R. Seidel and E. Unger",

year = "2003",

doi = "10.1557/proc-772-m4.5",

language = "English",

volume = "772",

pages = "3--15",

journal = "Materials Research Society Symposium - Proceedings",

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note = "Materials Research Society Symposium Proceedings: Nanotube-Based Devices ; Conference date: 22-04-2003 Through 25-04-2003",

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TY - JOUR

T1 - Integration of Carbon Nanotubes Devices into Microelectronics

AU - Hoenlein, W.

AU - Kreupl, F.

AU - Duesberg, G. S.

AU - Graham, A. P.

AU - Liebau, M.

AU - Seidel, R.

AU - Unger, E.

PY - 2003

Y1 - 2003

N2 - Carbon Nanotubes (CNTs) offer extraordinary properties for applications in microelectronics. We assess the methods used to grow CNTs for integration into microelectronics, in particular, metallic carbon nanotubes for vias and interconnects as well as semiconducting CNTs for field-effect devices are discussed. State-of-the-art CNTFETs are compared to Si-MOSFETs. A vertical CNTFET (VCNTFET) device concept is presented which offers better growth control, adding a new quality to microelectronics and making real 3-dimensional electronics possible.

AB - Carbon Nanotubes (CNTs) offer extraordinary properties for applications in microelectronics. We assess the methods used to grow CNTs for integration into microelectronics, in particular, metallic carbon nanotubes for vias and interconnects as well as semiconducting CNTs for field-effect devices are discussed. State-of-the-art CNTFETs are compared to Si-MOSFETs. A vertical CNTFET (VCNTFET) device concept is presented which offers better growth control, adding a new quality to microelectronics and making real 3-dimensional electronics possible.

UR - http://www.scopus.com/inward/record.url?scp=1642541148&partnerID=8YFLogxK

U2 - 10.1557/proc-772-m4.5

DO - 10.1557/proc-772-m4.5

M3 - Conference article

AN - SCOPUS:1642541148

SN - 0272-9172

VL - 772

SP - 3

EP - 15

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Materials Research Society Symposium Proceedings: Nanotube-Based Devices

Y2 - 22 April 2003 through 25 April 2003

ER -

Integration of Carbon Nanotubes Devices into Microelectronics

Abstract

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