Inspired by Nature: Efficient Piezoelectric MEMS Actuator Based on Wavelike Excitation

Regine Behlert, Gabriele Schrag

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

Nature inspires engineers in many respects. Fish locomotion by undulation, e.g., constitutes an optimized technique for transferring momentum from a moving body to a fluid. Considering this fact we conceived a novel integrated, piezoelectric MEMS actuator realized in an aluminum nitride thin-film technology and particularly designed for mimicking this principle. The goal is efficient fluid transport, e.g. for cooling or venting applications.A specifically derived theoretical framework based on numerical simulations, wavelet transforms, and energy balance calculations allows for classifying the generated fluid flow field and for quantifying the transferred local power densities at the fluid-structure interface. This way, the flapper's efficiency w.r.t. volume flow and energy consumption can be assessed allowing for comprehensive comparisons of various designs, excitation waveforms and for setting the benchmark to the natural archetype.

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages2344-2347
Number of pages4
ISBN (Electronic)9781728120072
DOIs
StatePublished - Jun 2019
Event20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
Duration: 23 Jun 201927 Jun 2019

Publication series

Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Country/TerritoryGermany
CityBerlin
Period23/06/1927/06/19

Keywords

  • Fluidic actuator
  • micropump
  • piezoelectricity
  • thin-film technology
  • vortex detection
  • wavelet transform

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