Innovative M(hfa)2·TMEDA (M=Cu, Co) precursors for the CVD of copper-cobalt oxides: An integrated theoretical and experimental approach

A. Gasparotto; D. Barreca; A. Devi; R. A. Fischer; E. Fois; A. Gamba; C. Maccato; R. Seraglia; G. Tabacchi; E. Tondello

doi:10.1149/1.3207638

Innovative M(hfa)₂·TMEDA (M=Cu, Co) precursors for the CVD of copper-cobalt oxides: An integrated theoretical and experimental approach

A. Gasparotto, D. Barreca, A. Devi, R. A. Fischer, E. Fois, A. Gamba, C. Maccato, R. Seraglia, G. Tabacchi, E. Tondello

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

10 Scopus citations

Abstract

This work is focused on a joint experimental and theoretical characterization of M(hfa)₂·TMEDA complexes [M=Cu, Co; hfa=1,1,1,5,5,5-hexafluoro-2,4-pentanedionate; TMEDA=N,N,N′,N′- tetramethylethylenediamine], innovative CVD precursors for Cu-Co oxides. The structural, vibrational and thermal properties of the above compounds, as well as their fragmentation pathways, have been thoroughly analyzed by Fourier Transform Infrared Spectroscopy (FT-IR), Electrospray Ionization Mass Spectrometry (ES1-MS) and tandem Mass Spectrometry (MS/MS), ThermoGravimetric Analysis (TGA), Differential Scanning Calorimetry (DSC). Results obtained by the above techniques have been integrated by ab-initio Density Functional Theory (DFT) calculations. The most relevant results, with particular regard to CVD applications of the target compounds, are presented and discussed.

Original language	English
Title of host publication	ECS Transactions - EuroCVD 17/CVD 17
Publisher	Electrochemical Society Inc.
Pages	549-556
Number of pages	8
Edition	8 PART 1
ISBN (Print)	9781566777452
DOIs	https://doi.org/10.1149/1.3207638
State	Published - 2009
Externally published	Yes
Event	17th International Chemical Vapor Deposition Symposium (CVD-XVII) - 216th Meeting of the Electrochemical Society - Vienna, Austria Duration: 4 Oct 2009 → 9 Oct 2009

Publication series

Name	ECS Transactions
Number	8 PART 1
Volume	25
ISSN (Print)	1938-5862
ISSN (Electronic)	1938-6737

Conference

Conference	17th International Chemical Vapor Deposition Symposium (CVD-XVII) - 216th Meeting of the Electrochemical Society
Country/Territory	Austria
City	Vienna
Period	4/10/09 → 9/10/09

Access to Document

10.1149/1.3207638

Cite this

Gasparotto, A., Barreca, D., Devi, A., Fischer, R. A., Fois, E., Gamba, A., Maccato, C., Seraglia, R., Tabacchi, G., & Tondello, E. (2009). Innovative M(hfa)₂·TMEDA (M=Cu, Co) precursors for the CVD of copper-cobalt oxides: An integrated theoretical and experimental approach. In ECS Transactions - EuroCVD 17/CVD 17 (8 PART 1 ed., pp. 549-556). (ECS Transactions; Vol. 25, No. 8 PART 1). Electrochemical Society Inc.. https://doi.org/10.1149/1.3207638

@inproceedings{584af029ea794726a76183cb14ae1908,

title = "Innovative M(hfa)2·TMEDA (M=Cu, Co) precursors for the CVD of copper-cobalt oxides: An integrated theoretical and experimental approach",

abstract = "This work is focused on a joint experimental and theoretical characterization of M(hfa)2·TMEDA complexes [M=Cu, Co; hfa=1,1,1,5,5,5-hexafluoro-2,4-pentanedionate; TMEDA=N,N,N′,N′- tetramethylethylenediamine], innovative CVD precursors for Cu-Co oxides. The structural, vibrational and thermal properties of the above compounds, as well as their fragmentation pathways, have been thoroughly analyzed by Fourier Transform Infrared Spectroscopy (FT-IR), Electrospray Ionization Mass Spectrometry (ES1-MS) and tandem Mass Spectrometry (MS/MS), ThermoGravimetric Analysis (TGA), Differential Scanning Calorimetry (DSC). Results obtained by the above techniques have been integrated by ab-initio Density Functional Theory (DFT) calculations. The most relevant results, with particular regard to CVD applications of the target compounds, are presented and discussed.",

author = "A. Gasparotto and D. Barreca and A. Devi and Fischer, {R. A.} and E. Fois and A. Gamba and C. Maccato and R. Seraglia and G. Tabacchi and E. Tondello",

year = "2009",

doi = "10.1149/1.3207638",

language = "English",

isbn = "9781566777452",

series = "ECS Transactions",

publisher = "Electrochemical Society Inc.",

number = "8 PART 1",

pages = "549--556",

booktitle = "ECS Transactions - EuroCVD 17/CVD 17",

edition = "8 PART 1",

note = "17th International Chemical Vapor Deposition Symposium (CVD-XVII) - 216th Meeting of the Electrochemical Society ; Conference date: 04-10-2009 Through 09-10-2009",

}

Gasparotto, A, Barreca, D, Devi, A, Fischer, RA, Fois, E, Gamba, A, Maccato, C, Seraglia, R, Tabacchi, G & Tondello, E 2009, Innovative M(hfa)₂·TMEDA (M=Cu, Co) precursors for the CVD of copper-cobalt oxides: An integrated theoretical and experimental approach. in ECS Transactions - EuroCVD 17/CVD 17. 8 PART 1 edn, ECS Transactions, no. 8 PART 1, vol. 25, Electrochemical Society Inc., pp. 549-556, 17th International Chemical Vapor Deposition Symposium (CVD-XVII) - 216th Meeting of the Electrochemical Society, Vienna, Austria, 4/10/09. https://doi.org/10.1149/1.3207638

Innovative M(hfa)₂·TMEDA (M=Cu, Co) precursors for the CVD of copper-cobalt oxides: An integrated theoretical and experimental approach. / Gasparotto, A.; Barreca, D.; Devi, A. et al.
ECS Transactions - EuroCVD 17/CVD 17. 8 PART 1. ed. Electrochemical Society Inc., 2009. p. 549-556 (ECS Transactions; Vol. 25, No. 8 PART 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Gasparotto, A.

AU - Barreca, D.

AU - Devi, A.

AU - Fischer, R. A.

AU - Fois, E.

AU - Gamba, A.

AU - Maccato, C.

AU - Seraglia, R.

AU - Tabacchi, G.

AU - Tondello, E.

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N2 - This work is focused on a joint experimental and theoretical characterization of M(hfa)2·TMEDA complexes [M=Cu, Co; hfa=1,1,1,5,5,5-hexafluoro-2,4-pentanedionate; TMEDA=N,N,N′,N′- tetramethylethylenediamine], innovative CVD precursors for Cu-Co oxides. The structural, vibrational and thermal properties of the above compounds, as well as their fragmentation pathways, have been thoroughly analyzed by Fourier Transform Infrared Spectroscopy (FT-IR), Electrospray Ionization Mass Spectrometry (ES1-MS) and tandem Mass Spectrometry (MS/MS), ThermoGravimetric Analysis (TGA), Differential Scanning Calorimetry (DSC). Results obtained by the above techniques have been integrated by ab-initio Density Functional Theory (DFT) calculations. The most relevant results, with particular regard to CVD applications of the target compounds, are presented and discussed.

AB - This work is focused on a joint experimental and theoretical characterization of M(hfa)2·TMEDA complexes [M=Cu, Co; hfa=1,1,1,5,5,5-hexafluoro-2,4-pentanedionate; TMEDA=N,N,N′,N′- tetramethylethylenediamine], innovative CVD precursors for Cu-Co oxides. The structural, vibrational and thermal properties of the above compounds, as well as their fragmentation pathways, have been thoroughly analyzed by Fourier Transform Infrared Spectroscopy (FT-IR), Electrospray Ionization Mass Spectrometry (ES1-MS) and tandem Mass Spectrometry (MS/MS), ThermoGravimetric Analysis (TGA), Differential Scanning Calorimetry (DSC). Results obtained by the above techniques have been integrated by ab-initio Density Functional Theory (DFT) calculations. The most relevant results, with particular regard to CVD applications of the target compounds, are presented and discussed.

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SN - 9781566777452

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BT - ECS Transactions - EuroCVD 17/CVD 17

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