Influence of surface oxides on hydrogen-sensitive Pd:GaN Schottky diodes

O. Weidemann, M. Hermann, G. Steinhoff, H. Wingbrant, A. Lloyd Spetz, M. Stutzmann, M. Eickhoff

Research output: Contribution to journalArticlepeer-review

100 Scopus citations

Abstract

Influence of surface oxides on hydrogen-sensitive Pd:GaN Schottky diodes was studied. Ex-situ fabricated devices show a sensitivity towards molecular hydrogen, which is about 50 times higher than for in situ deposited diodes. In situ deposited Pd Schottky contacts reveal lower barrier heights and drastically higher reverse currents.

Original languageEnglish
Pages (from-to)773-775
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number4
DOIs
StatePublished - 28 Jul 2003

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