Abstract
Influence of surface oxides on hydrogen-sensitive Pd:GaN Schottky diodes was studied. Ex-situ fabricated devices show a sensitivity towards molecular hydrogen, which is about 50 times higher than for in situ deposited diodes. In situ deposited Pd Schottky contacts reveal lower barrier heights and drastically higher reverse currents.
Original language | English |
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Pages (from-to) | 773-775 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 83 |
Issue number | 4 |
DOIs | |
State | Published - 28 Jul 2003 |