Influence of loss mechanisms on high Q whispering gallery mode (WGM) resonators suitable for RF applications

V. Silva Cortes; J. Binder; G. Fischer; A. Hagelauer

doi:10.1109/EDAPS.2017.8276917

Influence of loss mechanisms on high Q whispering gallery mode (WGM) resonators suitable for RF applications

V. Silva Cortes, J. Binder, G. Fischer, A. Hagelauer

Friedrich Alexander Universität Erlangen-Nürnberg

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

For a novel approach of resonators operating at radio frequencies (RF), extremely high quality factors (Q) in the order of Q > 100,000 are required. This work presents the impact on the Q-factors of the fundamental loss mechanisms of a micro-electro-mechanical systems (MEMS) resonator based on a disk structure working in radial bulk and whispering gallery modes (WGM). The theoretical feasibility of high Q is examined with finite element method (FEM) simulations. Thermoelastic damping (TED) and anchor losses are analyzed with FEM simulations, allowing to determine the dominant source of dissipation. Furthermore, the shortcomings of mechanical coupling in resonator arrays has been analyzed.

Original language	English
Title of host publication	2017 IEEE Electrical Design of Advanced Packaging and Systems Symposium, EDAPS 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1-3
Number of pages	3
ISBN (Electronic)	9781538612385
DOIs	https://doi.org/10.1109/EDAPS.2017.8276917
State	Published - 2 Jul 2017
Externally published	Yes
Event	2017 IEEE Electrical Design of Advanced Packaging and Systems Symposium, EDAPS 2017 - Haining, Zhejiang, China Duration: 14 Dec 2017 → 16 Dec 2017

Publication series

Name	2017 IEEE Electrical Design of Advanced Packaging and Systems Symposium, EDAPS 2017
Volume	2018-January

Conference

Conference	2017 IEEE Electrical Design of Advanced Packaging and Systems Symposium, EDAPS 2017
Country/Territory	China
City	Haining, Zhejiang
Period	14/12/17 → 16/12/17

Access to Document

10.1109/EDAPS.2017.8276917

Cite this

Silva Cortes, V., Binder, J., Fischer, G., & Hagelauer, A. (2017). Influence of loss mechanisms on high Q whispering gallery mode (WGM) resonators suitable for RF applications. In 2017 IEEE Electrical Design of Advanced Packaging and Systems Symposium, EDAPS 2017 (pp. 1-3). (2017 IEEE Electrical Design of Advanced Packaging and Systems Symposium, EDAPS 2017; Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/EDAPS.2017.8276917

Silva Cortes, V. ; Binder, J. ; Fischer, G. et al. / Influence of loss mechanisms on high Q whispering gallery mode (WGM) resonators suitable for RF applications. 2017 IEEE Electrical Design of Advanced Packaging and Systems Symposium, EDAPS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 1-3 (2017 IEEE Electrical Design of Advanced Packaging and Systems Symposium, EDAPS 2017).

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title = "Influence of loss mechanisms on high Q whispering gallery mode (WGM) resonators suitable for RF applications",

abstract = "For a novel approach of resonators operating at radio frequencies (RF), extremely high quality factors (Q) in the order of Q > 100,000 are required. This work presents the impact on the Q-factors of the fundamental loss mechanisms of a micro-electro-mechanical systems (MEMS) resonator based on a disk structure working in radial bulk and whispering gallery modes (WGM). The theoretical feasibility of high Q is examined with finite element method (FEM) simulations. Thermoelastic damping (TED) and anchor losses are analyzed with FEM simulations, allowing to determine the dominant source of dissipation. Furthermore, the shortcomings of mechanical coupling in resonator arrays has been analyzed.",

author = "{Silva Cortes}, V. and J. Binder and G. Fischer and A. Hagelauer",

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Silva Cortes, V, Binder, J, Fischer, G & Hagelauer, A 2017, Influence of loss mechanisms on high Q whispering gallery mode (WGM) resonators suitable for RF applications. in 2017 IEEE Electrical Design of Advanced Packaging and Systems Symposium, EDAPS 2017. 2017 IEEE Electrical Design of Advanced Packaging and Systems Symposium, EDAPS 2017, vol. 2018-January, Institute of Electrical and Electronics Engineers Inc., pp. 1-3, 2017 IEEE Electrical Design of Advanced Packaging and Systems Symposium, EDAPS 2017, Haining, Zhejiang, China, 14/12/17. https://doi.org/10.1109/EDAPS.2017.8276917

Influence of loss mechanisms on high Q whispering gallery mode (WGM) resonators suitable for RF applications. / Silva Cortes, V.; Binder, J.; Fischer, G. et al.
2017 IEEE Electrical Design of Advanced Packaging and Systems Symposium, EDAPS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 1-3 (2017 IEEE Electrical Design of Advanced Packaging and Systems Symposium, EDAPS 2017; Vol. 2018-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Silva Cortes V, Binder J, Fischer G, Hagelauer A. Influence of loss mechanisms on high Q whispering gallery mode (WGM) resonators suitable for RF applications. In 2017 IEEE Electrical Design of Advanced Packaging and Systems Symposium, EDAPS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 1-3. (2017 IEEE Electrical Design of Advanced Packaging and Systems Symposium, EDAPS 2017). doi: 10.1109/EDAPS.2017.8276917

Influence of loss mechanisms on high Q whispering gallery mode (WGM) resonators suitable for RF applications

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