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Influence of fluorinated gate oxides on the low frequency noise of mos transistors under analog operation

  • Siemens AG

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

16 Scopus citations

Abstract

The Ilf-noise amplitudes. of p- and nMOSFETs are investigated under biasing conditions relevant. for analog circuit operation. Significant improvement of the noise performance for both p- and n-MOSFETs was found by doping the gates of the devices with fluorine.

Original languageEnglish
Title of host publicationESSDERC 1998 - Proceedings of the 28th European Solid-State Device Research Conference
EditorsA. Touboul, Y. Danto, H. Grunbacher
PublisherIEEE Computer Society
Pages472-475
Number of pages4
ISBN (Electronic)2863322346
StatePublished - 1998
Event28th European Solid-State Device Research Conference, ESSDERC 1998 - Bordeaux, France
Duration: 8 Sep 199810 Sep 1998

Publication series

NameEuropean Solid-State Device Research Conference
ISSN (Print)1930-8876

Conference

Conference28th European Solid-State Device Research Conference, ESSDERC 1998
Country/TerritoryFrance
CityBordeaux
Period8/09/9810/09/98

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