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Influence of dissipated power distribution on BAW Resonators' behavior

  • A. Tag
  • , R. Weigel
  • , A. Hagelauer
  • , B. Bader
  • , C. Huck
  • , M. Pitschi
  • , D. Karolewski
  • Friedrich Alexander Universität Erlangen-Nürnberg
  • TDK-EPC Corporation
  • Institut fur Mikroelektronik- und Mechatronik-Systeme GmbH

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

18 Scopus citations

Abstract

By taking the spatial distribution of the dissipated power into account the modeling of Bulk Acoustic Wave Resonators at higher power levels could be improved. The simulation results have been verified by measurements of vectorial scattering parameters during high power loads and by measurements of the temperature increase due to the self-heating by infrared thermography.

Original languageEnglish
Title of host publicationIEEE International Ultrasonics Symposium, IUS
PublisherIEEE Computer Society
Pages2627-2630
Number of pages4
ISBN (Electronic)9781479970490
DOIs
StatePublished - 20 Oct 2014
Externally publishedYes
Event2014 IEEE International Ultrasonics Symposium, IUS 2014 - Chicago, United States
Duration: 3 Sep 20146 Sep 2014

Publication series

NameIEEE International Ultrasonics Symposium, IUS
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2014 IEEE International Ultrasonics Symposium, IUS 2014
Country/TerritoryUnited States
CityChicago
Period3/09/146/09/14

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