@inproceedings{8a56a11e82e74863a9447be26f14008c,
title = "Improvement of Roughness Measurement in Sub-micron Ranges Using Contrast-based Depolarization Field Components",
abstract = "The characterization of a surface, especially the roughness, is of great importance for industrial applications. There are already various optical methods for roughness measurement, which usually do not consider the depolarization effects of the scattered beam caused by the sample. This work aims out improving the roughness measurement method described in [1] by taking into account depolarization effects, due to the rough sample. For validation, other instruments are employed to compare the results in the measurement interval for which this technique is applied.",
keywords = "Roughness measurement, contrast, depolarization, optical method, speckle",
author = "Franziska P{\"o}ller and Bloise, {F{\'e}lix Salazar} and Martin Jakobi and Jie Dong and Koch, {Alexander W.}",
note = "Publisher Copyright: {\textcopyright} 2021, KIT Scientific Publishing. All rights reserved.; 5th International Conference on Optical Characterization of Materials, OCM 2021 ; Conference date: 17-03-2021 Through 18-03-2021",
year = "2021",
doi = "10.58895/ksp/1000128686-16",
language = "English",
isbn = "9783731510819",
series = "Optical Characterization of Materials",
publisher = "KIT Scientific Publishing",
pages = "173",
editor = "J{\"u}rgen Beyerer and Thomas L{\"a}ngle",
booktitle = "5th International Conference on Optical Characterization of Materials, OCM 2021",
address = "Germany",
}