Improved modeling of bulk acoustic wave resonators and filters

A. Hagelauer, R. Weigel, A. Link, B. Bader, S. Marksteiner, K. Wagner

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

9 Scopus citations


Duplexers and filters for mobile radio are one of the classic field ofapplication for the BAW technology. In recent years the size of the devices hasbeen reduced by about a half and the trend is still toward more compact designswith higher performance at the same time. This translates directly to verydemanding requirements on the effective coupling coefficient and on the qualityfactors of the underlying BAW resonators. Measurements show that the size andthe shape of the resonators have a significant influence on the overallperformance. Hence, size-relevant effects need to be considered in1D-simulation, which is the base for fast filter optimization. To evaluate theinfluence of the resonator size on the filter performance we analyzed severalSMR-BAW resonator area and shape variations in combination with differentoverlap sizes in a series of experiments. Moreover, the influence of the overlapsize on different resonator areas is studied with 2D-FEM simulations. In thispaper we present the results of our resonator measurements. The results arebasis for developing a modified 1D-model for designing BAW filters.Additionally, a new method for the extraction of an equivalent acousticimpedance for the description of the acoustics is presented and compared to themodified 1D-model.

Original languageEnglish
Title of host publication2010 IEEE International Ultrasonics Symposium, IUS 2010
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages4
ISBN (Print)9781457703829
StatePublished - 2010
Externally publishedYes

Publication series

NameProceedings - IEEE Ultrasonics Symposium
ISSN (Print)1051-0117


  • Bulk acoustic wave devices
  • q-factor
  • resonator shape
  • resonator size


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