Impact of High Sc Content on Crystal Morphology and RF Performance of Sputtered Al1-xScxN SMR BAW

Andreas Bogner; Hans Jorg Timme; Rudiger Bauder; Angelika Mutzbauer; Diana Pichler; Michael Krenzer; Christian Reccius; Robert Weigel; Amelie Hagelauer

doi:10.1109/ULTSYM.2019.8925777

Impact of High Sc Content on Crystal Morphology and RF Performance of Sputtered Al_1-xSc_xN SMR BAW

Andreas Bogner, Hans Jorg Timme, Rudiger Bauder, Angelika Mutzbauer, Diana Pichler, Michael Krenzer, Christian Reccius, Robert Weigel, Amelie Hagelauer

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

18 Scopus citations

Abstract

Applications using BAW devices benefit from large intrinsic electromechanical coupling materials, e.g. Al_1-xSc_xN. This work reports BAW-SMRs using high piezoelectric Al_1-xSc_xN and investigates the relations between Sc content, crystal morphology and resonator RF performance. Finally, key requirements for high quality Al_1-xSc_xN thin-film growth are analyzed and discussed examplary for x = 20at.-%.

Original language	English
Title of host publication	2019 IEEE International Ultrasonics Symposium, IUS 2019
Publisher	IEEE Computer Society
Pages	706-709
Number of pages	4
ISBN (Electronic)	9781728145969
DOIs	https://doi.org/10.1109/ULTSYM.2019.8925777
State	Published - Oct 2019
Externally published	Yes
Event	2019 IEEE International Ultrasonics Symposium, IUS 2019 - Glasgow, United Kingdom Duration: 6 Oct 2019 → 9 Oct 2019

Publication series

Name	IEEE International Ultrasonics Symposium, IUS
Volume	2019-October
ISSN (Print)	1948-5719
ISSN (Electronic)	1948-5727

Conference

Conference	2019 IEEE International Ultrasonics Symposium, IUS 2019
Country/Territory	United Kingdom
City	Glasgow
Period	6/10/19 → 9/10/19

Keywords

AlScN
BAW resonator
BAW-SMR
thin-film growth

Access to Document

10.1109/ULTSYM.2019.8925777

Cite this

Bogner, A., Timme, H. J., Bauder, R., Mutzbauer, A., Pichler, D., Krenzer, M., Reccius, C., Weigel, R., & Hagelauer, A. (2019). Impact of High Sc Content on Crystal Morphology and RF Performance of Sputtered Al_1-xSc_xN SMR BAW. In 2019 IEEE International Ultrasonics Symposium, IUS 2019 (pp. 706-709). Article 8925777 (IEEE International Ultrasonics Symposium, IUS; Vol. 2019-October). IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2019.8925777

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abstract = "Applications using BAW devices benefit from large intrinsic electromechanical coupling materials, e.g. Al1-xScxN. This work reports BAW-SMRs using high piezoelectric Al1-xScxN and investigates the relations between Sc content, crystal morphology and resonator RF performance. Finally, key requirements for high quality Al1-xScxN thin-film growth are analyzed and discussed examplary for x = 20at.-%.",

keywords = "AlScN, BAW resonator, BAW-SMR, thin-film growth",

author = "Andreas Bogner and Timme, {Hans Jorg} and Rudiger Bauder and Angelika Mutzbauer and Diana Pichler and Michael Krenzer and Christian Reccius and Robert Weigel and Amelie Hagelauer",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 2019 IEEE International Ultrasonics Symposium, IUS 2019 ; Conference date: 06-10-2019 Through 09-10-2019",

year = "2019",

month = oct,

doi = "10.1109/ULTSYM.2019.8925777",

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Bogner, A, Timme, HJ, Bauder, R, Mutzbauer, A, Pichler, D, Krenzer, M, Reccius, C, Weigel, R & Hagelauer, A 2019, Impact of High Sc Content on Crystal Morphology and RF Performance of Sputtered Al_1-xSc_xN SMR BAW. in 2019 IEEE International Ultrasonics Symposium, IUS 2019., 8925777, IEEE International Ultrasonics Symposium, IUS, vol. 2019-October, IEEE Computer Society, pp. 706-709, 2019 IEEE International Ultrasonics Symposium, IUS 2019, Glasgow, United Kingdom, 6/10/19. https://doi.org/10.1109/ULTSYM.2019.8925777

Impact of High Sc Content on Crystal Morphology and RF Performance of Sputtered Al_1-xSc_xN SMR BAW. / Bogner, Andreas; Timme, Hans Jorg; Bauder, Rudiger et al.
2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Computer Society, 2019. p. 706-709 8925777 (IEEE International Ultrasonics Symposium, IUS; Vol. 2019-October).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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