Hydrosilylation of crystalline silicon (111) and hydrogenated amorphous silicon surfaces: A comparative x-ray photoelectron spectroscopy study

A. Lehner; G. Steinhoff; M. S. Brandt; M. Eickhoff; M. Stutzmann

doi:10.1063/1.1593223

Hydrosilylation of crystalline silicon (111) and hydrogenated amorphous silicon surfaces: A comparative x-ray photoelectron spectroscopy study

A. Lehner
, G. Steinhoff
, M. S. Brandt
, M. Eickhoff
, M. Stutzmann

TUM Emeriti of Excellence

Walter Schottky Institut

Research output: Contribution to journal › Article › peer-review

50 Scopus citations

Abstract

A study was performed on hydrosilylation of crystalline silicon (111) and hydrogenated amorphous silicon surfaces. The x-ray photoelectron spectroscopy was used to analyze the resulting chemical surface structure. It was shown that the results demonstrated successful hydrosilylation on both substrate materials.

Original language	English
Pages (from-to)	2289-2294
Number of pages	6
Journal	Journal of Applied Physics
Volume	94
Issue number	4
DOIs	https://doi.org/10.1063/1.1593223
State	Published - 15 Aug 2003

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10.1063/1.1593223

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title = "Hydrosilylation of crystalline silicon (111) and hydrogenated amorphous silicon surfaces: A comparative x-ray photoelectron spectroscopy study",

abstract = "A study was performed on hydrosilylation of crystalline silicon (111) and hydrogenated amorphous silicon surfaces. The x-ray photoelectron spectroscopy was used to analyze the resulting chemical surface structure. It was shown that the results demonstrated successful hydrosilylation on both substrate materials.",

author = "A. Lehner and G. Steinhoff and Brandt, \{M. S.\} and M. Eickhoff and M. Stutzmann",

year = "2003",

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T2 - A comparative x-ray photoelectron spectroscopy study

AU - Lehner, A.

AU - Steinhoff, G.

AU - Brandt, M. S.

AU - Eickhoff, M.

AU - Stutzmann, M.

PY - 2003/8/15

Y1 - 2003/8/15

N2 - A study was performed on hydrosilylation of crystalline silicon (111) and hydrogenated amorphous silicon surfaces. The x-ray photoelectron spectroscopy was used to analyze the resulting chemical surface structure. It was shown that the results demonstrated successful hydrosilylation on both substrate materials.

AB - A study was performed on hydrosilylation of crystalline silicon (111) and hydrogenated amorphous silicon surfaces. The x-ray photoelectron spectroscopy was used to analyze the resulting chemical surface structure. It was shown that the results demonstrated successful hydrosilylation on both substrate materials.

UR - https://www.scopus.com/pages/publications/0041923642

U2 - 10.1063/1.1593223

DO - 10.1063/1.1593223

M3 - Article

AN - SCOPUS:0041923642

SN - 0021-8979

VL - 94

SP - 2289

EP - 2294

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 4

ER -

Hydrosilylation of crystalline silicon (111) and hydrogenated amorphous silicon surfaces: A comparative x-ray photoelectron spectroscopy study

Abstract

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