Hydrogen passivation of shallow acceptors in silicon

M. Stutzmann, C. P. Herrero

Research output: Contribution to journalArticlepeer-review

15 Scopus citations

Abstract

The common observation that point defects in semiconductors can be passivated by hydrogen is illustrated for the case of shallow acceptors in silicon. Earlier results of experimental and theoretical studies are briefly reviewed and recent progress in the understanding of the microscopic structure of acceptor-hydrogen complexes in crystalline Si is presented, with special emphasis on substitutional boron passivation as studied by nuclear techniques and Raman scattering.

Original languageEnglish
Pages (from-to)276-282
Number of pages7
JournalPhysica Scripta
Volume1989
Issue numberT25
DOIs
StatePublished - 1 Jan 1989
Externally publishedYes

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