TY - JOUR
T1 - Hybrid aluminum nitride integration on silicon nitride photonic circuits
AU - Terrasanta, Giulio
AU - Müller, Manuel
AU - Sommer, Timo
AU - Althammer, Matthias
AU - Poot, Menno
N1 - Publisher Copyright:
© OSA 2021, © 2021 The Author(s)
PY - 2021
Y1 - 2021
N2 - We demonstrate sputtering of high-quality aluminum nitride films onto prefabricated silicon nitride photonic circuits, simplifying their nanofabrication. Hybrid microring devices show reduced bending loss and low propagation losses, enabling future on-chip quantum optics experiments.
AB - We demonstrate sputtering of high-quality aluminum nitride films onto prefabricated silicon nitride photonic circuits, simplifying their nanofabrication. Hybrid microring devices show reduced bending loss and low propagation losses, enabling future on-chip quantum optics experiments.
UR - http://www.scopus.com/inward/record.url?scp=85120090814&partnerID=8YFLogxK
M3 - Conference article
AN - SCOPUS:85120090814
SN - 2162-2701
JO - Optics InfoBase Conference Papers
JF - Optics InfoBase Conference Papers
M1 - SF2A.2
T2 - CLEO: Science and Innovations, CLEO:S and I 2021 - Part of Conference on Lasers and Electro-Optics, CLEO 2021
Y2 - 9 May 2021 through 14 May 2021
ER -