Hybrid aluminum nitride integration on silicon nitride photonic circuits

Giulio Terrasanta, Manuel Müller, Timo Sommer, Matthias Althammer, Menno Poot

Research output: Contribution to journalConference articlepeer-review


We demonstrate sputtering of high-quality aluminum nitride films onto prefabricated silicon nitride photonic circuits, simplifying their nanofabrication. Hybrid microring devices show reduced bending loss and low propagation losses, enabling future on-chip quantum optics experiments.

Original languageEnglish
Article numberSF2A.2
JournalOptics InfoBase Conference Papers
StatePublished - 2021
EventCLEO: Science and Innovations, CLEO:S and I 2021 - Part of Conference on Lasers and Electro-Optics, CLEO 2021 - Virtual, Online, United States
Duration: 9 May 202114 May 2021


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