TY - GEN
T1 - Hybrid Aluminum Nitride Integration on Silicon Nitride Photonic Circuits
AU - Terrasanta, Giulio
AU - Muller, Manuel
AU - Sommer, Timo
AU - Althammer, Matthias
AU - Poot, Menno
N1 - Publisher Copyright:
© 2021 OSA.
PY - 2021/5
Y1 - 2021/5
N2 - We demonstrate sputtering of high-quality aluminum nitride films onto prefabricated silicon nitride photonic circuits, simplifying their nanofabrication. Hybrid microring devices show reduced bending loss and low propagation losses, enabling future on-chip quantum optics experiments.
AB - We demonstrate sputtering of high-quality aluminum nitride films onto prefabricated silicon nitride photonic circuits, simplifying their nanofabrication. Hybrid microring devices show reduced bending loss and low propagation losses, enabling future on-chip quantum optics experiments.
UR - http://www.scopus.com/inward/record.url?scp=85120442811&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85120442811
T3 - 2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings
BT - 2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2021 Conference on Lasers and Electro-Optics, CLEO 2021
Y2 - 9 May 2021 through 14 May 2021
ER -