Homogeneous high quality YBa2Cu3O7 films on 3″ and 4″ substrates

P. Berberich, B. Utz, W. Prusseit, H. Kinder

Research output: Contribution to journalArticlepeer-review

95 Scopus citations


The fabrication of homogeneous high quality YBa2Cu3O7 films on large area substrates is the first essential step on the way to commercial high temperature superconductor devices. We have succeeded in growing YBa2Cu3O7 films with excellent electronic properties and outstanding homogeneity in thickness and composition up to 4″ diameter. This was possible by employing reactive co-evaporation in combination with a special substrate heater design: a rotating disk holder separates oxidation and deposition enabling a reactive high oxygen pressure zone in a surrounding high vacuum background. Epitaxial YBa2Cu3O7 films were grown either directly on MgO (30 × 30 mm2) and LaAlO3 (3″) or with intermediate buffer layers on sapphire (4″), silicon (4″) and GaAs (3″). For GaAs substrates we developed a chemical encapsulation to avoid contamination by volatile arsenic. On all of these substrates we obtained zero resistance temperatures around 86 K and critical current densities jc (77 K) ≥ 2 × 106 A/cm2.

Original languageEnglish
Pages (from-to)497-504
Number of pages8
JournalPhysica C: Superconductivity and its Applications
Issue number3-4
StatePublished - 15 Jan 1994


Dive into the research topics of 'Homogeneous high quality YBa2Cu3O7 films on 3″ and 4″ substrates'. Together they form a unique fingerprint.

Cite this