Highly regular self-organization of step bunches during growth of SiGe on Si(113)

A. A. Darhuber; J. Zhu; V. Holý; J. Stangl; P. Mikulík; K. Brunner; G. Abstreiter; G. Bauer

doi:10.1063/1.122197

Highly regular self-organization of step bunches during growth of SiGe on Si(113)

A. A. Darhuber
, J. Zhu
, V. Holý
, J. Stangl
, P. Mikulík
, K. Brunner
, G. Abstreiter
, G. Bauer

TUM Emeriti of Excellence

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

We have studied the structural properties of highly periodic arrays of terrace steps in a Si/SiGe multilayer grown on a miscut Si(113) substrate by atomic force microscopy, x-ray reflection and high resolution x-ray diffraction. The data reveal a regular array of step bunches with vertical correlation within the multilayer and periodic surface steps extending over lengths of several tens of microns. The (113)-faceted terraces have a lateral period of about 360 nm which is locally modulated due to a long-range waviness of the surface.

Original language	English
Pages (from-to)	1535-1537
Number of pages	3
Journal	Applied Physics Letters
Volume	73
Issue number	11
DOIs	https://doi.org/10.1063/1.122197
State	Published - 1998

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@article{2ff315611b9f4384bd34aa43b8eb0b9a,

title = "Highly regular self-organization of step bunches during growth of SiGe on Si(113)",

abstract = "We have studied the structural properties of highly periodic arrays of terrace steps in a Si/SiGe multilayer grown on a miscut Si(113) substrate by atomic force microscopy, x-ray reflection and high resolution x-ray diffraction. The data reveal a regular array of step bunches with vertical correlation within the multilayer and periodic surface steps extending over lengths of several tens of microns. The (113)-faceted terraces have a lateral period of about 360 nm which is locally modulated due to a long-range waviness of the surface.",

author = "Darhuber, \{A. A.\} and J. Zhu and V. Hol{\'y} and J. Stangl and P. Mikul{\'i}k and K. Brunner and G. Abstreiter and G. Bauer",

year = "1998",

doi = "10.1063/1.122197",

language = "English",

volume = "73",

pages = "1535--1537",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "11",

}

TY - JOUR

T1 - Highly regular self-organization of step bunches during growth of SiGe on Si(113)

AU - Darhuber, A. A.

AU - Zhu, J.

AU - Holý, V.

AU - Stangl, J.

AU - Mikulík, P.

AU - Brunner, K.

AU - Abstreiter, G.

AU - Bauer, G.

PY - 1998

Y1 - 1998

N2 - We have studied the structural properties of highly periodic arrays of terrace steps in a Si/SiGe multilayer grown on a miscut Si(113) substrate by atomic force microscopy, x-ray reflection and high resolution x-ray diffraction. The data reveal a regular array of step bunches with vertical correlation within the multilayer and periodic surface steps extending over lengths of several tens of microns. The (113)-faceted terraces have a lateral period of about 360 nm which is locally modulated due to a long-range waviness of the surface.

AB - We have studied the structural properties of highly periodic arrays of terrace steps in a Si/SiGe multilayer grown on a miscut Si(113) substrate by atomic force microscopy, x-ray reflection and high resolution x-ray diffraction. The data reveal a regular array of step bunches with vertical correlation within the multilayer and periodic surface steps extending over lengths of several tens of microns. The (113)-faceted terraces have a lateral period of about 360 nm which is locally modulated due to a long-range waviness of the surface.

UR - https://www.scopus.com/pages/publications/0000093130

U2 - 10.1063/1.122197

DO - 10.1063/1.122197

M3 - Article

AN - SCOPUS:0000093130

SN - 0003-6951

VL - 73

SP - 1535

EP - 1537

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 11

ER -

Highly regular self-organization of step bunches during growth of SiGe on Si(113)

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