Highly regular self-organization of step bunches during growth of SiGe on Si(113)

A. A. Darhuber; J. Zhu; V. Holý; J. Stangl; P. Mikulík; K. Brunner; G. Abstreiter; G. Bauer

doi:10.1063/1.122197

Highly regular self-organization of step bunches during growth of SiGe on Si(113)

A. A. Darhuber, J. Zhu, V. Holý, J. Stangl, P. Mikulík, K. Brunner, G. Abstreiter, G. Bauer

TUM Emeriti of Excellence

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18 Scopus citations

Abstract

We have studied the structural properties of highly periodic arrays of terrace steps in a Si/SiGe multilayer grown on a miscut Si(113) substrate by atomic force microscopy, x-ray reflection and high resolution x-ray diffraction. The data reveal a regular array of step bunches with vertical correlation within the multilayer and periodic surface steps extending over lengths of several tens of microns. The (113)-faceted terraces have a lateral period of about 360 nm which is locally modulated due to a long-range waviness of the surface.

Original language	English
Pages (from-to)	1535-1537
Number of pages	3
Journal	Applied Physics Letters
Volume	73
Issue number	11
DOIs	https://doi.org/10.1063/1.122197
State	Published - 1998

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abstract = "We have studied the structural properties of highly periodic arrays of terrace steps in a Si/SiGe multilayer grown on a miscut Si(113) substrate by atomic force microscopy, x-ray reflection and high resolution x-ray diffraction. The data reveal a regular array of step bunches with vertical correlation within the multilayer and periodic surface steps extending over lengths of several tens of microns. The (113)-faceted terraces have a lateral period of about 360 nm which is locally modulated due to a long-range waviness of the surface.",

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AU - Darhuber, A. A.

AU - Zhu, J.

AU - Holý, V.

AU - Stangl, J.

AU - Mikulík, P.

AU - Brunner, K.

AU - Abstreiter, G.

AU - Bauer, G.

PY - 1998

Y1 - 1998

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AB - We have studied the structural properties of highly periodic arrays of terrace steps in a Si/SiGe multilayer grown on a miscut Si(113) substrate by atomic force microscopy, x-ray reflection and high resolution x-ray diffraction. The data reveal a regular array of step bunches with vertical correlation within the multilayer and periodic surface steps extending over lengths of several tens of microns. The (113)-faceted terraces have a lateral period of about 360 nm which is locally modulated due to a long-range waviness of the surface.

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JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 11

ER -

Highly regular self-organization of step bunches during growth of SiGe on Si(113)

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