High-speed mass flow sensor with heated silicon carbide bridges

C. Lyons, A. Friedberger, W. Welser, G. Mueller, G. Kroetz, R. Kassing

Research output: Contribution to conferencePaperpeer-review

26 Scopus citations

Abstract

A novel type of micromachined thermal mass flow sensor has been developed which is characterized by enhanced mechanical and thermal stability. For its realization β-SiC films were heteroepitaxially deposited onto pre-processed silicon wafers. After structuring the surface β-SiC films to form heater and temperature sensing elements, porous silicon was formed in predetermined parts of the silicon substrate to form flow channels. The so formed devices are able to detect bidirectional flows of air with a temporal resolution of 2-3 msec. Due to the excellent mechanical and thermal stability of the β-SiC heater and temperature sensing elements, the devices are able to sustain extremely harsh environmental and operating conditions: firstly, flows of pressurized air could be sustained without inflicting mechanical damage to the micromachined β-SiC bridges, secondly, several hours of thermal cleaning at white glow in ambient air could be endured before breakages due to thermal oxidation occurred.

Original languageEnglish
Pages356-360
Number of pages5
StatePublished - 1998
Externally publishedYes
EventProceedings of the 1998 IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems - Heidelberg, Ger
Duration: 25 Jan 199829 Jan 1998

Conference

ConferenceProceedings of the 1998 IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems
CityHeidelberg, Ger
Period25/01/9829/01/98

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