Abstract
We report on the design of an imaging microellipsometer enabling the generation of maps of the two ellipsometric angles Δ and P. Areas of 60×200μm2 are imaged at a rate of 1-2 images per minute. By working at angles (45°) much smaller than the Brewster angle (≈73° for Si/SiO2/air) a lateral resolution of 3 μm and a height resolution of 5 Å is achieved. The performance is demonstrated by thickness measurement of a laterally structured polymer film and a transient thickness measurement of dewetting fluid film of n-hexadecane on a Si/SiO2 wafer.
Original language | English |
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Pages (from-to) | 2930-2932 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 72 |
Issue number | 23 |
DOIs | |
State | Published - 1998 |