High resolution imaging microellipsometry of soft surfaces at 3 μm lateral and 5 Å normal resolution

A. Albersdörfer, G. Elender, G. Mathe, K. R. Neumaier, P. Paduschek, E. Sackmann

Research output: Contribution to journalArticlepeer-review

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Abstract

We report on the design of an imaging microellipsometer enabling the generation of maps of the two ellipsometric angles Δ and P. Areas of 60×200μm2 are imaged at a rate of 1-2 images per minute. By working at angles (45°) much smaller than the Brewster angle (≈73° for Si/SiO2/air) a lateral resolution of 3 μm and a height resolution of 5 Å is achieved. The performance is demonstrated by thickness measurement of a laterally structured polymer film and a transient thickness measurement of dewetting fluid film of n-hexadecane on a Si/SiO2 wafer.

Original languageEnglish
Pages (from-to)2930-2932
Number of pages3
JournalApplied Physics Letters
Volume72
Issue number23
DOIs
StatePublished - 1998

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