Guidelines for thin film usage and microfabrication for solid oxide fuel cell application

A. Bieberle-Hütter; A. Evans; H. Galinski; J. L.M. Rupp; T. Ryll; B. Scherrer; B. R. Tölke; L. J. Gauckler

doi:10.1149/1.3205613

Guidelines for thin film usage and microfabrication for solid oxide fuel cell application

A. Bieberle-Hütter
, A. Evans
, H. Galinski
, J. L.M. Rupp
, T. Ryll
, B. Scherrer
, B. R. Tölke
, L. J. Gauckler

ETH Zürich

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

Guidelines for thin film microfabrication and use in micro-solid oxide fuel cells (micro-SOFC) are given and discussed. Microstructures and microfabrication of metal oxide thin films, the selection of substrate materials, and feature size - property relation will be the main focus and illustrated with recent results from micro-SOFC research. These considerations will help to use silicon technology for the fabrication of micro-SOFC components.

Original language	English
Title of host publication	ECS Transactions - Solid Oxide Fuel Cells 11 (SOFC-XI)
Pages	925-930
Number of pages	6
Edition	2 PART 1
DOIs	https://doi.org/10.1149/1.3205613
State	Published - 2009
Externally published	Yes
Event	11th International Symposium on Solid Oxide Fuel Cells (SOFC-XI)- 216th ECS Meeting - Vienna, Austria Duration: 4 Oct 2009 → 9 Oct 2009

Publication series

Name	ECS Transactions
Number	2 PART 1
Volume	25
ISSN (Print)	1938-5862
ISSN (Electronic)	1938-6737

Conference

Conference	11th International Symposium on Solid Oxide Fuel Cells (SOFC-XI)- 216th ECS Meeting
Country/Territory	Austria
City	Vienna
Period	4/10/09 → 9/10/09

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy
SDG 9 Industry, Innovation, and Infrastructure

Access to Document

10.1149/1.3205613

Cite this

Bieberle-Hütter, A., Evans, A., Galinski, H., Rupp, J. L. M., Ryll, T., Scherrer, B., Tölke, B. R., & Gauckler, L. J. (2009). Guidelines for thin film usage and microfabrication for solid oxide fuel cell application. In ECS Transactions - Solid Oxide Fuel Cells 11 (SOFC-XI) (2 PART 1 ed., pp. 925-930). (ECS Transactions; Vol. 25, No. 2 PART 1). https://doi.org/10.1149/1.3205613

@inproceedings{4849cdfccc5147e5b969a6a2df03ce87,

title = "Guidelines for thin film usage and microfabrication for solid oxide fuel cell application",

abstract = "Guidelines for thin film microfabrication and use in micro-solid oxide fuel cells (micro-SOFC) are given and discussed. Microstructures and microfabrication of metal oxide thin films, the selection of substrate materials, and feature size - property relation will be the main focus and illustrated with recent results from micro-SOFC research. These considerations will help to use silicon technology for the fabrication of micro-SOFC components.",

author = "A. Bieberle-H{\"u}tter and A. Evans and H. Galinski and Rupp, \{J. L.M.\} and T. Ryll and B. Scherrer and T{\"o}lke, \{B. R.\} and Gauckler, \{L. J.\}",

year = "2009",

doi = "10.1149/1.3205613",

language = "English",

isbn = "9781566777391",

series = "ECS Transactions",

number = "2 PART 1",

pages = "925--930",

booktitle = "ECS Transactions - Solid Oxide Fuel Cells 11 (SOFC-XI)",

edition = "2 PART 1",

note = "11th International Symposium on Solid Oxide Fuel Cells (SOFC-XI)- 216th ECS Meeting ; Conference date: 04-10-2009 Through 09-10-2009",

}

Bieberle-Hütter, A, Evans, A, Galinski, H, Rupp, JLM, Ryll, T, Scherrer, B, Tölke, BR & Gauckler, LJ 2009, Guidelines for thin film usage and microfabrication for solid oxide fuel cell application. in ECS Transactions - Solid Oxide Fuel Cells 11 (SOFC-XI). 2 PART 1 edn, ECS Transactions, no. 2 PART 1, vol. 25, pp. 925-930, 11th International Symposium on Solid Oxide Fuel Cells (SOFC-XI)- 216th ECS Meeting, Vienna, Austria, 4/10/09. https://doi.org/10.1149/1.3205613

Guidelines for thin film usage and microfabrication for solid oxide fuel cell application. / Bieberle-Hütter, A.; Evans, A.; Galinski, H. et al.
ECS Transactions - Solid Oxide Fuel Cells 11 (SOFC-XI). 2 PART 1. ed. 2009. p. 925-930 (ECS Transactions; Vol. 25, No. 2 PART 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Guidelines for thin film usage and microfabrication for solid oxide fuel cell application

AU - Bieberle-Hütter, A.

AU - Evans, A.

AU - Galinski, H.

AU - Rupp, J. L.M.

AU - Ryll, T.

AU - Scherrer, B.

AU - Tölke, B. R.

AU - Gauckler, L. J.

PY - 2009

Y1 - 2009

N2 - Guidelines for thin film microfabrication and use in micro-solid oxide fuel cells (micro-SOFC) are given and discussed. Microstructures and microfabrication of metal oxide thin films, the selection of substrate materials, and feature size - property relation will be the main focus and illustrated with recent results from micro-SOFC research. These considerations will help to use silicon technology for the fabrication of micro-SOFC components.

AB - Guidelines for thin film microfabrication and use in micro-solid oxide fuel cells (micro-SOFC) are given and discussed. Microstructures and microfabrication of metal oxide thin films, the selection of substrate materials, and feature size - property relation will be the main focus and illustrated with recent results from micro-SOFC research. These considerations will help to use silicon technology for the fabrication of micro-SOFC components.

UR - https://www.scopus.com/pages/publications/77649260659

U2 - 10.1149/1.3205613

DO - 10.1149/1.3205613

M3 - Conference contribution

AN - SCOPUS:77649260659

SN - 9781566777391

T3 - ECS Transactions

SP - 925

EP - 930

BT - ECS Transactions - Solid Oxide Fuel Cells 11 (SOFC-XI)

T2 - 11th International Symposium on Solid Oxide Fuel Cells (SOFC-XI)- 216th ECS Meeting

Y2 - 4 October 2009 through 9 October 2009

ER -

Guidelines for thin film usage and microfabrication for solid oxide fuel cell application

Abstract

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UN SDGs

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