Growth and characterization of self-assembled Ge-rich islands on Si

G. Abstreiter, P. Schittenhelm, C. Engel, E. Silveira, A. Zrenner, D. Meertens, W. Jäger

Research output: Contribution to journalArticlepeer-review

195 Scopus citations

Abstract

Ge-rich islands have been grown on Si (100) substrates by molecular beam epitaxy. Their density and size distribution are analysed by atomic force microscopy as a function of growth temperature, growth rate and Ge coverage. Overgrown islands have been studied by transmission electron microscopy, Raman scattering and photoluminescence. The first results of photocurrent spectroscopy on Si/Ge/Si pin diodes show the expected shift of the energy gap. Based on these results, novel device applications of Ge-rich islands in Si are proposed.

Original languageEnglish
Pages (from-to)1521-1528
Number of pages8
JournalSemiconductor Science and Technology
Volume11
Issue number11 SUPPL. S
DOIs
StatePublished - Nov 1996

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