Abstract
The paper reports on novel gas-sensing devices based on group III-nitride materials. Both platinum (Pt)-GaN Schottky diodes as well as high-electron-mobility transistors formed from GaN/AlGaN heterostructures with catalytically active platinum gates were investigated. The performance of these devices towards a number of relevant exhaust gas components such as H2, HC, CO, NOx was tested. Test gas concentrations were chosen to simulate exhaust gas emissions from lean-burn 4-stroke petrol engines. We found that GaN-based devices with platinum electrodes are mainly sensitive to hydrogen and unsaturated hydrocarbons with a sizeable cross-sensitivity to CO and NO2. These performance characteristics are similar to those of comparable SiC devices. With GaN devices this performance, however, can be obtained at a reduced complexity of the device processing and a greater freedom in the choice of sensor architectures.
| Original language | English |
|---|---|
| Pages (from-to) | 207-214 |
| Number of pages | 8 |
| Journal | Materials Science and Engineering B: Solid-State Materials for Advanced Technology |
| Volume | 93 |
| Issue number | 1-3 |
| DOIs | |
| State | Published - 30 May 2002 |
Keywords
- Combustion monitoring
- GaN
- GaN/AlGaN-heterostructures
- Gas sensors
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