Gd2O3 nanostructured thin films analyzed by XPS

Davide Barreca; Alberto Gasparotto; Andrian Milanov; Eugenio Tondello; Anjana Devi; Roland A. Fischer

doi:10.1116/11.20080703

Gd₂O₃ nanostructured thin films analyzed by XPS

Davide Barreca
, Alberto Gasparotto
, Andrian Milanov
, Eugenio Tondello
, Anjana Devi
, Roland A. Fischer

University of Padova
Max-Planck-lnstitut für Kohlenforschung

Research output: Contribution to journal › Article › peer-review

47 Scopus citations

Abstract

The present work was devoted to the X-ray photoelectron spectroscopy (XPS) investigation of the principal core levels of a nanostructured Gd₂O₃ thin film. The sample was synthesized by metal organic chemical vapor deposition (MOCVD) from Gd((iPrN)₂CNMe₂)₃ as precursor at 500 °C in an N₂/O₂ atmosphere. XPS results evidenced a marked Gd2O3 reactivity towards atmospheric CO₂ and H₂O, leading to a surface composition characterized by the co-presence of gadolinium carbonates/bicarbonates and hydroxides.

Original language	English
Article number	SSSPEN000014000001000060000001
Pages (from-to)	60-67
Number of pages	8
Journal	Surface Science Spectra
Volume	14
Issue number	1-4
DOIs	https://doi.org/10.1116/11.20080703
State	Published - 2007
Externally published	Yes

Keywords

GdO
High-k
MOCVD
Thin films
X-ray photoelectron spectroscopy

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10.1116/11.20080703

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title = "Gd2O3 nanostructured thin films analyzed by XPS",

abstract = "The present work was devoted to the X-ray photoelectron spectroscopy (XPS) investigation of the principal core levels of a nanostructured Gd2O3 thin film. The sample was synthesized by metal organic chemical vapor deposition (MOCVD) from Gd((iPrN)2CNMe2)3 as precursor at 500 °C in an N2/O2 atmosphere. XPS results evidenced a marked Gd2O3 reactivity towards atmospheric CO2 and H2O, leading to a surface composition characterized by the co-presence of gadolinium carbonates/bicarbonates and hydroxides.",

keywords = "GdO, High-k, MOCVD, Thin films, X-ray photoelectron spectroscopy",

author = "Davide Barreca and Alberto Gasparotto and Andrian Milanov and Eugenio Tondello and Anjana Devi and Fischer, \{Roland A.\}",

year = "2007",

doi = "10.1116/11.20080703",

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pages = "60--67",

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AU - Barreca, Davide

AU - Gasparotto, Alberto

AU - Milanov, Andrian

AU - Tondello, Eugenio

AU - Devi, Anjana

AU - Fischer, Roland A.

PY - 2007

Y1 - 2007

N2 - The present work was devoted to the X-ray photoelectron spectroscopy (XPS) investigation of the principal core levels of a nanostructured Gd2O3 thin film. The sample was synthesized by metal organic chemical vapor deposition (MOCVD) from Gd((iPrN)2CNMe2)3 as precursor at 500 °C in an N2/O2 atmosphere. XPS results evidenced a marked Gd2O3 reactivity towards atmospheric CO2 and H2O, leading to a surface composition characterized by the co-presence of gadolinium carbonates/bicarbonates and hydroxides.

AB - The present work was devoted to the X-ray photoelectron spectroscopy (XPS) investigation of the principal core levels of a nanostructured Gd2O3 thin film. The sample was synthesized by metal organic chemical vapor deposition (MOCVD) from Gd((iPrN)2CNMe2)3 as precursor at 500 °C in an N2/O2 atmosphere. XPS results evidenced a marked Gd2O3 reactivity towards atmospheric CO2 and H2O, leading to a surface composition characterized by the co-presence of gadolinium carbonates/bicarbonates and hydroxides.

KW - GdO

KW - High-k

KW - MOCVD

KW - Thin films

KW - X-ray photoelectron spectroscopy

UR - https://www.scopus.com/pages/publications/77956896601

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DO - 10.1116/11.20080703

M3 - Article

AN - SCOPUS:77956896601

SN - 1055-5269

VL - 14

SP - 60

EP - 67

JO - Surface Science Spectra

JF - Surface Science Spectra

IS - 1-4

M1 - SSSPEN000014000001000060000001

ER -

Gd₂O₃ nanostructured thin films analyzed by XPS

Abstract

Keywords

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