Gas sensing properties and p-type response of ALD TiO2 coated carbon nanotubes

Catherine Marichy; Nicola Donato; Mariangela Latino; Marc Georg Willinger; Jean Philippe Tessonnier; Giovanni Neri; Nicola Pinna

doi:10.1088/0957-4484/26/2/024004

Gas sensing properties and p-type response of ALD TiO₂ coated carbon nanotubes

Catherine Marichy, Nicola Donato, Mariangela Latino, Marc Georg Willinger, Jean Philippe Tessonnier, Giovanni Neri, Nicola Pinna

Research output: Contribution to journal › Article › peer-review

42 Scopus citations

Abstract

Amorphous titanium dioxide-coated carbon nanotubes (CNTs) were prepared by atomic layer deposition (ALD) and investigated as sensing layers for resistive NO₂ and O₂ gas sensors. By varying ALD process conditions and CNT structure, heterostructures with different metal oxide grain size, morphology and coating thickness were synthesized. Higher responses were observed with homogeneous and continuous 5.5 nm thick films onto CNTs at an operating temperature of 150 °C, while CNTs decorated with either discontinuous film or TiO₂ nanoparticles showed a weak response close to the one of device made of bare CNTs. An unexpected p-type behavior in presence of the target gas was also noticed, independently of the metal oxide morphology and thickness. Based on previous works, hypotheses were made in order to explain the p-type behavior of TiO²/CNT sensors.

Original language	English
Article number	024004
Journal	Nanotechnology
Volume	26
Issue number	2
DOIs	https://doi.org/10.1088/0957-4484/26/2/024004
State	Published - 16 Jan 2015
Externally published	Yes

Keywords

Atomic layer deposition
Carbon nanotube
Gas sensing
Heterostructures
Titanium dioxide

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10.1088/0957-4484/26/2/024004

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title = "Gas sensing properties and p-type response of ALD TiO2 coated carbon nanotubes",

abstract = "Amorphous titanium dioxide-coated carbon nanotubes (CNTs) were prepared by atomic layer deposition (ALD) and investigated as sensing layers for resistive NO2 and O2 gas sensors. By varying ALD process conditions and CNT structure, heterostructures with different metal oxide grain size, morphology and coating thickness were synthesized. Higher responses were observed with homogeneous and continuous 5.5 nm thick films onto CNTs at an operating temperature of 150 °C, while CNTs decorated with either discontinuous film or TiO2 nanoparticles showed a weak response close to the one of device made of bare CNTs. An unexpected p-type behavior in presence of the target gas was also noticed, independently of the metal oxide morphology and thickness. Based on previous works, hypotheses were made in order to explain the p-type behavior of TiO2/CNT sensors.",

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AU - Marichy, Catherine

AU - Donato, Nicola

AU - Latino, Mariangela

AU - Willinger, Marc Georg

AU - Tessonnier, Jean Philippe

AU - Neri, Giovanni

AU - Pinna, Nicola

PY - 2015/1/16

Y1 - 2015/1/16

N2 - Amorphous titanium dioxide-coated carbon nanotubes (CNTs) were prepared by atomic layer deposition (ALD) and investigated as sensing layers for resistive NO2 and O2 gas sensors. By varying ALD process conditions and CNT structure, heterostructures with different metal oxide grain size, morphology and coating thickness were synthesized. Higher responses were observed with homogeneous and continuous 5.5 nm thick films onto CNTs at an operating temperature of 150 °C, while CNTs decorated with either discontinuous film or TiO2 nanoparticles showed a weak response close to the one of device made of bare CNTs. An unexpected p-type behavior in presence of the target gas was also noticed, independently of the metal oxide morphology and thickness. Based on previous works, hypotheses were made in order to explain the p-type behavior of TiO2/CNT sensors.

AB - Amorphous titanium dioxide-coated carbon nanotubes (CNTs) were prepared by atomic layer deposition (ALD) and investigated as sensing layers for resistive NO2 and O2 gas sensors. By varying ALD process conditions and CNT structure, heterostructures with different metal oxide grain size, morphology and coating thickness were synthesized. Higher responses were observed with homogeneous and continuous 5.5 nm thick films onto CNTs at an operating temperature of 150 °C, while CNTs decorated with either discontinuous film or TiO2 nanoparticles showed a weak response close to the one of device made of bare CNTs. An unexpected p-type behavior in presence of the target gas was also noticed, independently of the metal oxide morphology and thickness. Based on previous works, hypotheses were made in order to explain the p-type behavior of TiO2/CNT sensors.

KW - Atomic layer deposition

KW - Carbon nanotube

KW - Gas sensing

KW - Heterostructures

KW - Titanium dioxide

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Gas sensing properties and p-type response of ALD TiO₂ coated carbon nanotubes

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Keywords

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