Functionalization of 6H-SiC surfaces with organosilanes

We demonstrate the successful covalent functionalization of n -type 6H-SiC with organosilanes. In particular, wet-chemically processed self-assembled layers of octadecyltrimethoxysilane and amino-propyldiethoxymethylsilane were investigated. The structural and chemical properties of these layers were studied by contact angle measurements, atomic force microscopy, thermal desorption, and x-ray photoelectron spectroscopy. The organic layers are smooth and wetting angles up to 100° are observed. Desorption temperatures in the range of 830 K prove the covalent bonding of the organic molecules to the SiC surface. By utilizing self-assembled layers with functional end groups, attachment of complex molecules was demonstrated by immobilization of proteins on micropatterned organic layers.