Full-Wave Analysis of Transmission Line Structures in Damascene Technology

Dzianis Lukashevich, Peter Russer

Research output: Contribution to conferencePaperpeer-review

Abstract

Further reduction of microwave monolithic integrated circuit (MMIC) dimensions will require multilayered wiring and transmission line structures with cross-sectional dimensions of the conductors in the order of micrometers. In order to achieve further reduction in conductor losses, copper is also considered for internal wiring. The exact modelling of the transmission properties of the line structures requires full-wave modelling of the electromagnetic field in the semiconductor and insulator regions as well as within the conductors. In this paper various transmission line structures have been analyzed using the mode matching (MM) approach. Based on the numerical simulation of the transmission lines equivalent network-oriented models (NOMs) are extracted.

Original languageEnglish
Pages519-524
Number of pages6
StatePublished - 2003
Event19th Annual Review of Progress in Applied Computational Electromagnetics - Monterey, CA, United States
Duration: 24 Mar 200328 Mar 2003

Conference

Conference19th Annual Review of Progress in Applied Computational Electromagnetics
Country/TerritoryUnited States
CityMonterey, CA
Period24/03/0328/03/03

Keywords

  • Damascene Technology
  • Microwave Monolithic Integrated Circuits (MMICs)
  • Mode Matching (MM) Method
  • Network-Oriented Models (NOMs)

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