Flexible handling system for an electron beam based microsystem production centre

M. F. Zäh, M. Franzkowiak

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

The predominantly small and medium-sized companies of the micro technology sector require universal production systems that enable a cost-effective production of microsystems in small and medium quantities. The concept of an electron beam based production centre is presented with focus on its handling system that is designed according to the special requirements concerning vacuum, electron beam processes, and flexibility.

Original languageEnglish
Title of host publicationProceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006
EditorsH. Zervos
Publishereuspen
Pages24-27
Number of pages4
ISBN (Electronic)0955308208, 9780955308208
StatePublished - 2006
Event6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006 - Baden bei Wien, Vienna, Austria
Duration: 28 May 20061 Jun 2006

Publication series

NameProceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006
Volume2

Conference

Conference6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006
Country/TerritoryAustria
CityBaden bei Wien, Vienna
Period28/05/061/06/06

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