Finite element simulations combined with statistical analysis of variance: Exploring the potential of piezoelectric MEMS microphones

G. Schrag, T. Reutter, G. Wachutka

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

Finite Element Analysis (FEA) has successfully been combined with the statistical analysis of variance (ANOVA) method to explore the potential of different piezoelectric microphone designs. The impact of the relevant design parameters on the overall microphone performance (sensitivity and frequency response) has been investigated, leading to an optimized design with a sensitivity of 1.64 mV/Pa (without amplification). This is much higher than reported for any other piezoelectric microphone variants in literature. Furthermore, the novel membrane design has been optimized with respect to robustness against thermally induced intrinsic stress variations, which is crucial in all layered membrane structures. The underlying FEA models have been calibrated on the basis of measurements on dedicated test structures.

Original languageEnglish
Title of host publication2013 Transducers and Eurosensors XXVII
Subtitle of host publicationThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages1452-1455
Number of pages4
DOIs
StatePublished - 2013
Event2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain
Duration: 16 Jun 201320 Jun 2013

Publication series

Name2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Conference

Conference2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Country/TerritorySpain
CityBarcelona
Period16/06/1320/06/13

Keywords

  • Piezoelectric microphone
  • analysis of variance
  • coupled simulations
  • finite element analysis
  • optimization

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