@inproceedings{d4aa516be3f24d86bb7d7282bef60f42,
title = "Finite element modeling of electro-mechanical coupling in capacitive micro-systems",
abstract = "In this paper advanced multi-physics simulations of micro-electro- mechanical systems (MEMS) are used to investigate their dynamic behaviour. The strong coupled electro-mechanical Finite Element (FE) formulation is used to model the electro-mechanical interactions and to perform modal and transient analysis taking into account large deformation effects. The application examples simulate two micro-resonators consisting in a clamped-clamped beam suspended over a substrate (the lower electrode). When a voltage is applied between the beam and the substrate, electrostatic forces appear which force the beam to bend. When the applied voltage is increased up to the pull-in limit, the electrostatic force becomes dominant and the plates stick together. The pull-in voltage is an essential design parameters in capacitive micro-systems. Here we also define a new design parameter describing the limit dynamic behaviour, namely the dynamic pull-in voltage.",
keywords = "Electro-mechanical coupling, Finite element, Micro-systems, Nonlinearity, Pull-in",
author = "V. Rochus and Rixen, {D. J.} and Golinval, {J. C.}",
year = "2005",
language = "English",
isbn = "0976798522",
series = "2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings",
pages = "704--707",
editor = "M. Laudon and B. Romanowicz",
booktitle = "2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings",
note = "2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 ; Conference date: 08-05-2005 Through 12-05-2005",
}